Synthesis, microstructural and optical characterization of LiNbO3 thin films deposited by aerosol assisted chemical vapor deposition

This work reports the synthesis, micro-structural characterization and optical properties of lithium niobate (LiNbO3) thin films deposited by aerosol assisted chemical vapor deposition (AACVD) on silicon substrates. The films deposited were polycrystalline, uniform, dense, nonlight scattering and fi...

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Detalles Bibliográficos
Autores: J. A. Ocón-Arellanes, J. G. Murillo-Ramírez, P. Amézaga-Madrid, M. Miki-Yoshida
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2014
País:México
Institución:Centro de Investigación en Materiales Avanzados
Repositorio:Redalyc-CIMAV
OAI Identifier:oai:redalyc.org:41631683003
Acceso en línea:https://www.redalyc.org/articulo.oa?id=41631683003
Access Level:acceso abierto
Palabra clave:Multidisciplinarias (Ciencias Sociales)
LiNbO3 thin films
piezoelectric material
aerosol assisted chemical vapor deposition (AACVD)
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spelling Synthesis, microstructural and optical characterization of LiNbO3 thin films deposited by aerosol assisted chemical vapor depositionJ. A. Ocón-ArellanesJ. G. Murillo-RamírezP. Amézaga-MadridM. Miki-YoshidaMultidisciplinarias (Ciencias Sociales)LiNbO3 thin filmspiezoelectric materialaerosol assisted chemical vapor deposition (AACVD)This work reports the synthesis, micro-structural characterization and optical properties of lithium niobate (LiNbO3) thin films deposited by aerosol assisted chemical vapor deposition (AACVD) on silicon substrates. The films deposited were polycrystalline, uniform, dense, nonlight scattering and firmly adhered to the substrate. This was deduced from high resolution electron microscopy studies and spectral reflectance measurements. The films were not epitaxial; however, they are considered smooth enough to be employed in optical waveguide applications, since their roughness is very low compared to the wavelength of the utilizable radiation.Universidad de Guanajuato2014info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdf0188-6266https://www.redalyc.org/articulo.oa?id=41631683003Acta Universitaria (México) Num.4 Vol.24reponame:Redalyc-CIMAVinstname:Centro de Investigación en Materiales Avanzadosinstacron:CIMAVenhttp://www.redalyc.org/revista.oa?id=416Acta Universitariainfo:eu-repo/semantics/openAccessoai:redalyc.org:416316830032024-08-23T21:48:40Z
dc.title.none.fl_str_mv Synthesis, microstructural and optical characterization of LiNbO3 thin films deposited by aerosol assisted chemical vapor deposition
title Synthesis, microstructural and optical characterization of LiNbO3 thin films deposited by aerosol assisted chemical vapor deposition
spellingShingle Synthesis, microstructural and optical characterization of LiNbO3 thin films deposited by aerosol assisted chemical vapor deposition
J. A. Ocón-Arellanes
Multidisciplinarias (Ciencias Sociales)
LiNbO3 thin films
piezoelectric material
aerosol assisted chemical vapor deposition (AACVD)
title_short Synthesis, microstructural and optical characterization of LiNbO3 thin films deposited by aerosol assisted chemical vapor deposition
title_full Synthesis, microstructural and optical characterization of LiNbO3 thin films deposited by aerosol assisted chemical vapor deposition
title_fullStr Synthesis, microstructural and optical characterization of LiNbO3 thin films deposited by aerosol assisted chemical vapor deposition
title_full_unstemmed Synthesis, microstructural and optical characterization of LiNbO3 thin films deposited by aerosol assisted chemical vapor deposition
title_sort Synthesis, microstructural and optical characterization of LiNbO3 thin films deposited by aerosol assisted chemical vapor deposition
dc.creator.none.fl_str_mv J. A. Ocón-Arellanes
J. G. Murillo-Ramírez
P. Amézaga-Madrid
M. Miki-Yoshida
author J. A. Ocón-Arellanes
author_facet J. A. Ocón-Arellanes
J. G. Murillo-Ramírez
P. Amézaga-Madrid
M. Miki-Yoshida
author_role author
author2 J. G. Murillo-Ramírez
P. Amézaga-Madrid
M. Miki-Yoshida
author2_role author
author
author
dc.subject.none.fl_str_mv Multidisciplinarias (Ciencias Sociales)
LiNbO3 thin films
piezoelectric material
aerosol assisted chemical vapor deposition (AACVD)
topic Multidisciplinarias (Ciencias Sociales)
LiNbO3 thin films
piezoelectric material
aerosol assisted chemical vapor deposition (AACVD)
description This work reports the synthesis, micro-structural characterization and optical properties of lithium niobate (LiNbO3) thin films deposited by aerosol assisted chemical vapor deposition (AACVD) on silicon substrates. The films deposited were polycrystalline, uniform, dense, nonlight scattering and firmly adhered to the substrate. This was deduced from high resolution electron microscopy studies and spectral reflectance measurements. The films were not epitaxial; however, they are considered smooth enough to be employed in optical waveguide applications, since their roughness is very low compared to the wavelength of the utilizable radiation.
publishDate 2014
dc.date.none.fl_str_mv 2014
dc.type.none.fl_str_mv info:eu-repo/semantics/publishedVersion
info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv 0188-6266
https://www.redalyc.org/articulo.oa?id=41631683003
identifier_str_mv 0188-6266
url https://www.redalyc.org/articulo.oa?id=41631683003
dc.language.none.fl_str_mv en
language_invalid_str_mv en
dc.relation.none.fl_str_mv http://www.redalyc.org/revista.oa?id=416
dc.rights.none.fl_str_mv Acta Universitaria
info:eu-repo/semantics/openAccess
rights_invalid_str_mv Acta Universitaria
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Universidad de Guanajuato
publisher.none.fl_str_mv Universidad de Guanajuato
dc.source.none.fl_str_mv Acta Universitaria (México) Num.4 Vol.24
reponame:Redalyc-CIMAV
instname:Centro de Investigación en Materiales Avanzados
instacron:CIMAV
instname_str Centro de Investigación en Materiales Avanzados
instacron_str CIMAV
institution CIMAV
reponame_str Redalyc-CIMAV
collection Redalyc-CIMAV
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15.812429

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