Influencia del tratamiento térmico en la cristalización y rugosidad de películas delgadas de LiNbO3 depositadas por el método Spin Coating

Lithium niobate (LiNbO3) thin films with 1/1 stoichiometry were prepared by a spin-coating from polymeric precursor method. The films deposited on silicon (100) substrates, were thermally treated from 400° to 600°C for 3 hours in order to study the influence of thermal treatment on the crystallinity...

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Detalles Bibliográficos
Autores: Zirpoli, A. [UNESP], Varela, José Arana [UNESP], González, A. H M [UNESP], Gimenez, R. [UNESP], Cavalheiro, A. A. [UNESP], Cilense, M. [UNESP], Zaghete, M. A. [UNESP], Stojanovic, B. [UNESP]
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2001
País:Brasil
Institución:Universidade Estadual Paulista (UNESP)
Repositorio:Repositório Institucional da UNESP
Idioma:español
OAI Identifier:oai:repositorio.unesp.br:11449/66617
Acceso en línea:http://boletines.secv.es/upload/20090505112758.200140275.pdf
http://dx.doi.org/10.3989/cyv.2001.v40.i4.736
http://hdl.handle.net/11449/66617
Access Level:acceso abierto
Palabra clave:LiNbO3
Spin-coating
Thermal Treatment
Thin Films
Descripción
Sumario:Lithium niobate (LiNbO3) thin films with 1/1 stoichiometry were prepared by a spin-coating from polymeric precursor method. The films deposited on silicon (100) substrates, were thermally treated from 400° to 600°C for 3 hours in order to study the influence of thermal treatment on the crystallinity, microstructure, grain size and roughness. X-ray diffraction (XRD) results showed that LiNbO3 phase crystallizes at low temperature (400°C). It was observed by scanning electron microscopy (SEM) that it is possible to obtain dense thin films at temperatures around 500°C. The atomic force microscopy (AFM) results showed that the grain size and roughness are strongly influenced by the annealing temperature.

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