Synthesis, microstructural and optical characterization of LiNbO3 thin films deposited by aerosol assisted chemical vapor deposition
This work reports the synthesis, micro-structural characterization and optical properties of lithium niobate (LiNbO3) thin films deposited by aerosol assisted chemical vapor deposition (AACVD) on silicon substrates. The films deposited were polycrystalline, uniform, dense, non-light scattering and f...
| Autores: | , , , |
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| Tipo de recurso: | artículo |
| Estado: | Versión publicada |
| Fecha de publicación: | 2014 |
| País: | México |
| Institución: | UNIVERSIDAD DE GUANAJUATO |
| Repositorio: | Acta Universitaria |
| Idioma: | inglés |
| OAI Identifier: | oai:www.actauniversitaria.ugto.mx:article/623 |
| Acceso en línea: | https://www.actauniversitaria.ugto.mx/index.php/acta/article/view/623 |
| Access Level: | acceso abierto |
| Palabra clave: | LiNbO3 thin films aerosol assisted chemical vapor deposition (AACVD) piezoelectric material. Synthesis and structural and optical characterization of thin films |
| Sumario: | This work reports the synthesis, micro-structural characterization and optical properties of lithium niobate (LiNbO3) thin films deposited by aerosol assisted chemical vapor deposition (AACVD) on silicon substrates. The films deposited were polycrystalline, uniform, dense, non-light scattering and firmly adhered to the substrate. This was deduced from high resolution electron microscopy studies and spectral reflectance measurements. The films were not epitaxial; however, they are considered smooth enough to be employed in optical waveguide applications, since their roughness is very low compared to the wavelength of the utilizable radiation. |
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