Synthesis, microstructural and optical characterization of LiNbO3 thin films deposited by aerosol assisted chemical vapor deposition
This work reports the synthesis, micro-structural characterization and optical properties of lithium niobate (LiNbO3) thin films deposited by aerosol assisted chemical vapor deposition (AACVD) on silicon substrates. The films deposited were polycrystalline, uniform, dense, nonlight scattering and fi...
| Autores: | , , , |
|---|---|
| Tipo de recurso: | artículo |
| Estado: | Versión publicada |
| Fecha de publicación: | 2014 |
| País: | México |
| Institución: | Centro de Investigación en Materiales Avanzados |
| Repositorio: | Redalyc-CIMAV |
| OAI Identifier: | oai:redalyc.org:41631683003 |
| Acceso en línea: | https://www.redalyc.org/articulo.oa?id=41631683003 |
| Access Level: | acceso abierto |
| Palabra clave: | Multidisciplinarias (Ciencias Sociales) LiNbO3 thin films piezoelectric material aerosol assisted chemical vapor deposition (AACVD) |
| Sumario: | This work reports the synthesis, micro-structural characterization and optical properties of lithium niobate (LiNbO3) thin films deposited by aerosol assisted chemical vapor deposition (AACVD) on silicon substrates. The films deposited were polycrystalline, uniform, dense, nonlight scattering and firmly adhered to the substrate. This was deduced from high resolution electron microscopy studies and spectral reflectance measurements. The films were not epitaxial; however, they are considered smooth enough to be employed in optical waveguide applications, since their roughness is very low compared to the wavelength of the utilizable radiation. |
|---|