La Metrología Óptica y sus Aplicaciones
In this work an introduction to optical metrology is presented with a brief description of its main tool which is interferometry. Also, a survey of the main different methods used in optical metrology is described with a special emphasis on the most recent developments.
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| Tipo de recurso: | artículo |
| Estado: | Versión publicada |
| Fecha de publicación: | 2005 |
| País: | México |
| Institución: | UNIVERSIDAD DE GUANAJUATO |
| Repositorio: | Acta Universitaria |
| Idioma: | español |
| OAI Identifier: | oai:www.actauniversitaria.ugto.mx:article/218 |
| Acceso en línea: | https://www.actauniversitaria.ugto.mx/index.php/acta/article/view/218 |
| Access Level: | acceso abierto |
| Palabra clave: | Metrología óptica Interferometría. Optical metrology Interferometry. |
| Sumario: | In this work an introduction to optical metrology is presented with a brief description of its main tool which is interferometry. Also, a survey of the main different methods used in optical metrology is described with a special emphasis on the most recent developments. |
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