La Metrología Óptica y sus Aplicaciones

In this work an introduction to optical metrology is presented with a brief description of its main tool which is interferometry. Also, a survey of the main different methods used in optical metrology is described with a special emphasis on the most recent developments.

Detalles Bibliográficos
Autor: Malacara Hernández, Daniel
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2005
País:México
Institución:UNIVERSIDAD DE GUANAJUATO
Repositorio:Acta Universitaria
Idioma:español
OAI Identifier:oai:www.actauniversitaria.ugto.mx:article/218
Acceso en línea:https://www.actauniversitaria.ugto.mx/index.php/acta/article/view/218
Access Level:acceso abierto
Palabra clave:Metrología óptica
Interferometría.
Optical metrology
Interferometry.
Descripción
Sumario:In this work an introduction to optical metrology is presented with a brief description of its main tool which is interferometry. Also, a survey of the main different methods used in optical metrology is described with a special emphasis on the most recent developments.