Nonlinear distributed model for bulk acoustic wave resonators

This work expands the model proposed by Krimtholz, Leedom, and Matthaei (KLM) model to account for the nonlinear effects occurring in acoustic devices due to the nonlinear stiffened elasticity.We show that a nonlinear distributed capacitance in the acoustic transmission line of the KLM model can acc...

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Detalles Bibliográficos
Autores: Collado Gómez, Juan Carlos|||0000-0002-8869-2739, Rocas Cantenys, Eduard, Mateu Mateu, Jordi|||0000-0001-9833-9966, Padilla Díaz, Alberto, O'Callaghan Castellà, Juan Manuel|||0000-0002-2740-0202
Tipo de recurso: artículo
Fecha de publicación:2009
País:España
Institución:Universitat Politècnica de Catalunya (UPC)
Repositorio:UPCommons. Portal del coneixement obert de la UPC
Idioma:inglés
OAI Identifier:oai:upcommons.upc.edu:2117/6226
Acceso en línea:https://hdl.handle.net/2117/6226
https://dx.doi.org/10.1109/TMTT.2009.2034211
Access Level:acceso abierto
Palabra clave:Nonlinear theories
Resonator
Bulk acoustic wave (BAW) Film bulk acoustic Resonator
Ones
Àrees temàtiques de la UPC::Enginyeria de la telecomunicació
Descripción
Sumario:This work expands the model proposed by Krimtholz, Leedom, and Matthaei (KLM) model to account for the nonlinear effects occurring in acoustic devices due to the nonlinear stiffened elasticity.We show that a nonlinear distributed capacitance in the acoustic transmission line of the KLM model can account for the distributed nature of the nonlinear effects. Specifically, we use the nonlinear telegrapher’s equation to find closed-form equations for intermodulation distortion and harmonic generation. We confirm the validity of these equations by comparing their results with those provided by aKLMequivalent circuit in which the nonlinear transmission line is implemented by cascading many L-C cells having a voltage-dependent capacitance. To further confirm the model, we show measured nonlinear effects in a thin film bulk acoustic resonator in close agreement with the equivalent circuit simulations.