AlN-based BAW resonators with CNT electrodes for gravimetric biosensing

Bibliographic Details
Authors:	García-Gancedo, Luis, Zhu, Z., Iborra Grau, Enrique\|\|\|0000-0002-1385-1379, Clement Lorenzo, Marta\|\|\|0000-0003-4956-8206, Olivares Roza, Jimena\|\|\|0000-0003-4396-4363, Flewitt, A.J., Milne, W.I., Ashley, G.M., Luo, J.K., Zhao, X.B., Lu, J.R.
Format:	article
Publication Date:	2011
Country:	España
Institution:	Universidad Politécnica de Madrid
Repository:	Archivo Digital UPM
OAI Identifier:	oai:oa.upm.es:11764
Online Access:	https://oa.upm.es/11764/
Access Level:	Open access
Keyword:	Biosensor Carbon nanotube (CNT) Aluminum nitride (AlN) Bulk acoustic wave resonator (BAW) Gravimetric biosensor

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