Quantitative Electrostatic Force Microscopy-Phase on Silicon Oxide Nanostructures

[EN] Phase-mode electrostatic force microscopy (EFM-Phase) is aviable technique to image surface electrostatic potential ofsilicon oxide stripes fabricated by oxidation scanning probelithography, exhibiting an inhomogeneous distribution of lo-calized charges trapped within the stripes during the ele...

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Detalles Bibliográficos
Autores: Albonetti, Cristiano, Chiodini, Stefano, Annibale, Paolo, Stoliar, Pablo, Martínez, Ramsés V., García García, Ricardo, Biscarini, Fabio
Tipo de recurso: artículo
Estado:Versión aceptada para publicación
Fecha de publicación:2020
País:España
Institución:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/216620
Acceso en línea:http://hdl.handle.net/10261/216620
Access Level:acceso abierto
Palabra clave:Electrostatic force microscopy
Nanostructures
Oxidation scanningprobe lithography
Prolate spheroidal coordinates
Silicon oxide
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spelling Quantitative Electrostatic Force Microscopy-Phase on Silicon Oxide NanostructuresAlbonetti, CristianoChiodini, StefanoAnnibale, PaoloStoliar, PabloMartínez, Ramsés V.García García, RicardoBiscarini, FabioElectrostatic force microscopyNanostructuresOxidation scanningprobe lithographyProlate spheroidal coordinatesSilicon oxide[EN] Phase-mode electrostatic force microscopy (EFM-Phase) is aviable technique to image surface electrostatic potential ofsilicon oxide stripes fabricated by oxidation scanning probelithography, exhibiting an inhomogeneous distribution of lo-calized charges trapped within the stripes during the electro-chemical reaction. We show here that these nanopatterns areuseful benchmark samples for assessing the spatial/voltageresolution of EFM-phase. To quantitatively extract the rel-evant observables, we developed and applied an analyticalmodel of the electrostatic interactions in which the tip and thesurface are modelled in a prolate spheroidal coordinates sys-tem, fitting accurately experimental data. A lateral resolutionof ∼60 nm, which is comparable to the lateral resolution ofEFM experiments reported in the literature, and a charge res-olution of ∼20 electrons are achieved. This electrostatic anal-ysis evidences the presence of a bimodal population of trappedcharges in the nanopatterned stripes.The authors wish to thank Roberta Nipoti for useful discus-sion and suggestions and NanosensorsTMfor providing EFM tips during the ForceTool project. SPM images were elaboratedwith the software Gwyddion (Neˇcas & Klapetek, 2012), datawere analysed by the GNU General Public Licensed SoftwareQtiPlot and figures are prepared by the GNU General Public Licensed Software Veusz. Analytical and numerical calculiare performed and/or checked by the GNU General Public Li-censed Software Maxima. AFM, EFM-Phase and SEM imageswere collected in the SPM@ISMN facility. The work was sup-ported by EC FP7 ONE-P large-scale project n° 212311, EU-STREP ForceTool (NMP4-CT-2004-STRP 013684), the Ministerio de Ciencia, Investigación e Innovación (MAT2009-08650) and Regione Emilia Romagna ‘PRRIITT PROMINER’Peer reviewedWiley-VCHEuropean CommissionMinisterio de Ciencia, Innovación y Universidades (España)García García, Ricardo [0000-0002-7115-1928]Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]202020202020info:eu-repo/semantics/articlehttp://purl.org/coar/resource_type/c_6501Postprintinfo:eu-repo/semantics/acceptedVersionhttp://hdl.handle.net/10261/216620reponame:DIGITAL.CSIC. Repositorio Institucional del CSICinstname:Consejo Superior de Investigaciones Científicas (CSIC)Inglés#PLACEHOLDER_PARENT_METADATA_VALUE#info:eu-repo/grantAgreement/EC/FP7/212311https://doi.org/10.1111/jmi.12938Síinfo:eu-repo/semantics/openAccessoai:digital.csic.es:10261/2166202026-05-22T06:33:51Z
dc.title.none.fl_str_mv Quantitative Electrostatic Force Microscopy-Phase on Silicon Oxide Nanostructures
title Quantitative Electrostatic Force Microscopy-Phase on Silicon Oxide Nanostructures
spellingShingle Quantitative Electrostatic Force Microscopy-Phase on Silicon Oxide Nanostructures
Albonetti, Cristiano
Electrostatic force microscopy
Nanostructures
Oxidation scanningprobe lithography
Prolate spheroidal coordinates
Silicon oxide
title_short Quantitative Electrostatic Force Microscopy-Phase on Silicon Oxide Nanostructures
title_full Quantitative Electrostatic Force Microscopy-Phase on Silicon Oxide Nanostructures
title_fullStr Quantitative Electrostatic Force Microscopy-Phase on Silicon Oxide Nanostructures
title_full_unstemmed Quantitative Electrostatic Force Microscopy-Phase on Silicon Oxide Nanostructures
title_sort Quantitative Electrostatic Force Microscopy-Phase on Silicon Oxide Nanostructures
dc.creator.none.fl_str_mv Albonetti, Cristiano
Chiodini, Stefano
Annibale, Paolo
Stoliar, Pablo
Martínez, Ramsés V.
García García, Ricardo
Biscarini, Fabio
author Albonetti, Cristiano
author_facet Albonetti, Cristiano
Chiodini, Stefano
Annibale, Paolo
Stoliar, Pablo
Martínez, Ramsés V.
García García, Ricardo
Biscarini, Fabio
author_role author
author2 Chiodini, Stefano
Annibale, Paolo
Stoliar, Pablo
Martínez, Ramsés V.
García García, Ricardo
Biscarini, Fabio
author2_role author
author
author
author
author
author
dc.contributor.none.fl_str_mv European Commission
Ministerio de Ciencia, Innovación y Universidades (España)
García García, Ricardo [0000-0002-7115-1928]
Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]
dc.subject.none.fl_str_mv Electrostatic force microscopy
Nanostructures
Oxidation scanningprobe lithography
Prolate spheroidal coordinates
Silicon oxide
topic Electrostatic force microscopy
Nanostructures
Oxidation scanningprobe lithography
Prolate spheroidal coordinates
Silicon oxide
description [EN] Phase-mode electrostatic force microscopy (EFM-Phase) is aviable technique to image surface electrostatic potential ofsilicon oxide stripes fabricated by oxidation scanning probelithography, exhibiting an inhomogeneous distribution of lo-calized charges trapped within the stripes during the electro-chemical reaction. We show here that these nanopatterns areuseful benchmark samples for assessing the spatial/voltageresolution of EFM-phase. To quantitatively extract the rel-evant observables, we developed and applied an analyticalmodel of the electrostatic interactions in which the tip and thesurface are modelled in a prolate spheroidal coordinates sys-tem, fitting accurately experimental data. A lateral resolutionof ∼60 nm, which is comparable to the lateral resolution ofEFM experiments reported in the literature, and a charge res-olution of ∼20 electrons are achieved. This electrostatic anal-ysis evidences the presence of a bimodal population of trappedcharges in the nanopatterned stripes.
publishDate 2020
dc.date.none.fl_str_mv 2020
2020
2020
dc.type.none.fl_str_mv info:eu-repo/semantics/article
http://purl.org/coar/resource_type/c_6501
Postprint
info:eu-repo/semantics/acceptedVersion
format article
status_str acceptedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/10261/216620
url http://hdl.handle.net/10261/216620
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv #PLACEHOLDER_PARENT_METADATA_VALUE#
info:eu-repo/grantAgreement/EC/FP7/212311
https://doi.org/10.1111/jmi.12938
Sí
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.publisher.none.fl_str_mv Wiley-VCH
publisher.none.fl_str_mv Wiley-VCH
dc.source.none.fl_str_mv reponame:DIGITAL.CSIC. Repositorio Institucional del CSIC
instname:Consejo Superior de Investigaciones Científicas (CSIC)
instname_str Consejo Superior de Investigaciones Científicas (CSIC)
reponame_str DIGITAL.CSIC. Repositorio Institucional del CSIC
collection DIGITAL.CSIC. Repositorio Institucional del CSIC
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15,812429

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