Quantitative Electrostatic Force Microscopy-Phase on Silicon Oxide Nanostructures
[EN] Phase-mode electrostatic force microscopy (EFM-Phase) is aviable technique to image surface electrostatic potential ofsilicon oxide stripes fabricated by oxidation scanning probelithography, exhibiting an inhomogeneous distribution of lo-calized charges trapped within the stripes during the ele...
| Autores: | , , , , , , |
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| Tipo de recurso: | artículo |
| Estado: | Versión aceptada para publicación |
| Fecha de publicación: | 2020 |
| País: | España |
| Institución: | Consejo Superior de Investigaciones Científicas (CSIC) |
| Repositorio: | DIGITAL.CSIC. Repositorio Institucional del CSIC |
| OAI Identifier: | oai:digital.csic.es:10261/216620 |
| Acceso en línea: | http://hdl.handle.net/10261/216620 |
| Access Level: | acceso abierto |
| Palabra clave: | Electrostatic force microscopy Nanostructures Oxidation scanningprobe lithography Prolate spheroidal coordinates Silicon oxide |
| Sumario: | [EN] Phase-mode electrostatic force microscopy (EFM-Phase) is aviable technique to image surface electrostatic potential ofsilicon oxide stripes fabricated by oxidation scanning probelithography, exhibiting an inhomogeneous distribution of lo-calized charges trapped within the stripes during the electro-chemical reaction. We show here that these nanopatterns areuseful benchmark samples for assessing the spatial/voltageresolution of EFM-phase. To quantitatively extract the rel-evant observables, we developed and applied an analyticalmodel of the electrostatic interactions in which the tip and thesurface are modelled in a prolate spheroidal coordinates sys-tem, fitting accurately experimental data. A lateral resolutionof ∼60 nm, which is comparable to the lateral resolution ofEFM experiments reported in the literature, and a charge res-olution of ∼20 electrons are achieved. This electrostatic anal-ysis evidences the presence of a bimodal population of trappedcharges in the nanopatterned stripes. |
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