Exploration of alternative gate dielectric materials for RADFET sensors

RADFETs are a low-cost option for implementing a radiation sensor. The characteristics of their gate dielectric material is the key element due to its sensitivity to ionizing radiation. We have studied alternative (high-K and organic) materials to the conventional SiO<inf>2</inf>-based g...

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Detalles Bibliográficos
Autores: Amat, Esteve, Martínez Domingo, Carme, Fleta, Celeste, Mas Torrent, Marta, Santos Lozano, M. Asunción
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2025
País:España
Institución:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/396533
Acceso en línea:http://hdl.handle.net/10261/396533
https://api.elsevier.com/content/abstract/scopus_id/105008174865
Access Level:acceso abierto
Palabra clave:Gate dielectrics
MOSFETs
RADFETs
Radiation sensors
Descripción
Sumario:RADFETs are a low-cost option for implementing a radiation sensor. The characteristics of their gate dielectric material is the key element due to its sensitivity to ionizing radiation. We have studied alternative (high-K and organic) materials to the conventional SiO<inf>2</inf>-based gate dielectric in order to improve the device performance. Electrical characterization in irradiated samples has been carried on to study the radiation response of each material to low levels of ionizing radiation. The HfO<inf>2</inf>-based samples have a much higher sensitivity per unit thickness than the SiO<inf>2</inf>-based ones. High-K based RADFETs show promising performance as gate dielectrics for future silicon based radiation sensors.