Characterization at Different Temperatures of HfO2-based RadFETs and Mask Design for CMOS Dosimetry Devices: RadDFETs and Floating-Gate Sensors
This Final Master’s Thesis focuses on the development of MOS-based radiation dosimeters, particularly HfO2-based RadFETs and floating-gate devices. Electrical characterization of 37 RadFETs fabricated at IMB-CNM was performed across four temperatures (10–40 ◦C) to analyze threshold voltage behavior...
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| Tipo de recurso: | tesis de maestría |
| Fecha de publicación: | 2025 |
| País: | España |
| Institución: | Universitat Politècnica de Catalunya (UPC) |
| Repositorio: | UPCommons. Portal del coneixement obert de la UPC |
| Idioma: | inglés |
| OAI Identifier: | oai:upcommons.upc.edu:2117/451682 |
| Acceso en línea: | https://hdl.handle.net/2117/451682 |
| Access Level: | acceso abierto |
| Palabra clave: | Radiation dosimetry RadFET Floating-gate dosimeter HfO2 Zero Temperature Coefficient Electrical characterization Radiació--Dosimetria Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica |
| Sumario: | This Final Master’s Thesis focuses on the development of MOS-based radiation dosimeters, particularly HfO2-based RadFETs and floating-gate devices. Electrical characterization of 37 RadFETs fabricated at IMB-CNM was performed across four temperatures (10–40 ◦C) to analyze threshold voltage behavior and determine the Zero Temperature Coefficient (ZTC) point. ZTC was identified at (VG,ZTC, ID,ZTC) = (5.358 V, 0.329 mA), with low variability in gate voltage and higher dispersion in drain current due to lowlevel measurement noise. A few outlier devices suggest potential yield considerations. In parallel, complete photolithographic mask sets were designed for RadFET variants and a floating-gate dosimeter adapted from IC M´alaga. This work provides a foundation for future irradiations and long-term studies. The final fabrication of floating-gate structures will be carried out at IMB-CNM using its CMOS process line, enabling experimental validation and paving the way for their future integration into compact radiation monitoring systems. |
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