A Simple Substrate Heater Device With Temperature Controller for Thin Film Preparation

A simple substrate heater and its temperature controller were designed and built in order to prepare thin films in a high vacuum deposition system. The substrate heater was elaborated with a glass-ceramic body and a molybdenum foil heater. The applied power and the temperature are regulated by a pow...

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Detalles Bibliográficos
Autores: Rendón, G., Poot, P., Oliva, A.I., Espinosa-Faller, F.J.
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2012
País:México
Institución:UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO
Repositorio:Journal of Applied Research and Technology
Idioma:español
OAI Identifier:oai:ojs2.localhost:article/374
Acceso en línea:https://jart.icat.unam.mx/index.php/jart/article/view/374
Access Level:acceso abierto
Palabra clave:substrate heater
temperature controller
vacuum thin film deposition
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spelling A Simple Substrate Heater Device With Temperature Controller for Thin Film PreparationRendón, G.Poot, P.Oliva, A.I.Espinosa-Faller, F.J.substrate heatertemperature controllervacuum thin film depositionA simple substrate heater and its temperature controller were designed and built in order to prepare thin films in a high vacuum deposition system. The substrate heater was elaborated with a glass-ceramic body and a molybdenum foil heater. The applied power and the temperature are regulated by a power controller board using a microcontroller programmed with a proportional-integrative-derivative algorithm. The heater/controller system was tested in a high vacuum deposition system and the results of its characterization at 100, 200, 300 and 400 °C are presented. A variation in temperature better than ± 0.5 °C was obtained for all the tested temperatures. An application of the substrate heater is demonstrated by evaporating gold thin films on heated glass substrates.Universidad Nacional Autónoma de México2012-08-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionPeer-reviewed Articleapplication/pdfhttps://jart.icat.unam.mx/index.php/jart/article/view/37410.22201/icat.16656423.2012.10.4.374Journal of Applied Research and Technology; Vol. 10 No. 4Journal of Applied Research and Technology; Vol. 10 Núm. 42448-67361665-642310.22201/icat.24486736e.2012.10.4reponame:Journal of Applied Research and Technologyinstname:UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICOinstacron:UNAMspahttps://jart.icat.unam.mx/index.php/jart/article/view/374/371Copyright (c) 2018 Journal of Applied Research and Technologyinfo:eu-repo/semantics/openAccessoai:ojs2.localhost:article/3742024-08-16T17:54:15Z
dc.title.none.fl_str_mv A Simple Substrate Heater Device With Temperature Controller for Thin Film Preparation
title A Simple Substrate Heater Device With Temperature Controller for Thin Film Preparation
spellingShingle A Simple Substrate Heater Device With Temperature Controller for Thin Film Preparation
Rendón, G.
substrate heater
temperature controller
vacuum thin film deposition
title_short A Simple Substrate Heater Device With Temperature Controller for Thin Film Preparation
title_full A Simple Substrate Heater Device With Temperature Controller for Thin Film Preparation
title_fullStr A Simple Substrate Heater Device With Temperature Controller for Thin Film Preparation
title_full_unstemmed A Simple Substrate Heater Device With Temperature Controller for Thin Film Preparation
title_sort A Simple Substrate Heater Device With Temperature Controller for Thin Film Preparation
dc.creator.none.fl_str_mv Rendón, G.
Poot, P.
Oliva, A.I.
Espinosa-Faller, F.J.
author Rendón, G.
author_facet Rendón, G.
Poot, P.
Oliva, A.I.
Espinosa-Faller, F.J.
author_role author
author2 Poot, P.
Oliva, A.I.
Espinosa-Faller, F.J.
author2_role author
author
author
dc.subject.none.fl_str_mv substrate heater
temperature controller
vacuum thin film deposition
topic substrate heater
temperature controller
vacuum thin film deposition
description A simple substrate heater and its temperature controller were designed and built in order to prepare thin films in a high vacuum deposition system. The substrate heater was elaborated with a glass-ceramic body and a molybdenum foil heater. The applied power and the temperature are regulated by a power controller board using a microcontroller programmed with a proportional-integrative-derivative algorithm. The heater/controller system was tested in a high vacuum deposition system and the results of its characterization at 100, 200, 300 and 400 °C are presented. A variation in temperature better than ± 0.5 °C was obtained for all the tested temperatures. An application of the substrate heater is demonstrated by evaporating gold thin films on heated glass substrates.
publishDate 2012
dc.date.none.fl_str_mv 2012-08-01
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
Peer-reviewed Article
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv https://jart.icat.unam.mx/index.php/jart/article/view/374
10.22201/icat.16656423.2012.10.4.374
url https://jart.icat.unam.mx/index.php/jart/article/view/374
identifier_str_mv 10.22201/icat.16656423.2012.10.4.374
dc.language.none.fl_str_mv spa
language spa
dc.relation.none.fl_str_mv https://jart.icat.unam.mx/index.php/jart/article/view/374/371
dc.rights.none.fl_str_mv Copyright (c) 2018 Journal of Applied Research and Technology
info:eu-repo/semantics/openAccess
rights_invalid_str_mv Copyright (c) 2018 Journal of Applied Research and Technology
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Universidad Nacional Autónoma de México
publisher.none.fl_str_mv Universidad Nacional Autónoma de México
dc.source.none.fl_str_mv Journal of Applied Research and Technology; Vol. 10 No. 4
Journal of Applied Research and Technology; Vol. 10 Núm. 4
2448-6736
1665-6423
10.22201/icat.24486736e.2012.10.4
reponame:Journal of Applied Research and Technology
instname:UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO
instacron:UNAM
instname_str UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO
instacron_str UNAM
institution UNAM
reponame_str Journal of Applied Research and Technology
collection Journal of Applied Research and Technology
repository.name.fl_str_mv
repository.mail.fl_str_mv
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