A Simple Substrate Heater Device With Temperature Controller for Thin Film Preparation
A simple substrate heater and its temperature controller were designed and built in order to prepare thin films in a high vacuum deposition system. The substrate heater was elaborated with a glass-ceramic body and a molybdenum foil heater. The applied power and the temperature are regulated by a pow...
| Autores: | , , , |
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| Tipo de recurso: | artículo |
| Estado: | Versión publicada |
| Fecha de publicación: | 2012 |
| País: | México |
| Institución: | UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO |
| Repositorio: | Journal of Applied Research and Technology |
| Idioma: | español |
| OAI Identifier: | oai:ojs2.localhost:article/374 |
| Acceso en línea: | https://jart.icat.unam.mx/index.php/jart/article/view/374 |
| Access Level: | acceso abierto |
| Palabra clave: | substrate heater temperature controller vacuum thin film deposition |
| Sumario: | A simple substrate heater and its temperature controller were designed and built in order to prepare thin films in a high vacuum deposition system. The substrate heater was elaborated with a glass-ceramic body and a molybdenum foil heater. The applied power and the temperature are regulated by a power controller board using a microcontroller programmed with a proportional-integrative-derivative algorithm. The heater/controller system was tested in a high vacuum deposition system and the results of its characterization at 100, 200, 300 and 400 °C are presented. A variation in temperature better than ± 0.5 °C was obtained for all the tested temperatures. An application of the substrate heater is demonstrated by evaporating gold thin films on heated glass substrates. |
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