Micro-optical components: Applications

The importance of MEMS (and MOEMS) is undeniable nowadays. Indeed, an incredible number of applications are concerned by those components which size is less than 1 mm (portable telephone filters, motors, pumps, airbags, printing systems, sensors, telecommunications, barcode readers etc …). This succ...

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Detalles Bibliográficos
Autor: FRANCISCO JAVIER RENERO CARRILLO
Tipo de recurso: informe técnico
Estado:Versión publicada
Fecha de publicación:2007
País:México
Institución:Instituto Nacional de Astrofísica, Óptica y Electrónica
Repositorio:Repositorio Institucional del INAOE
Idioma:inglés
OAI Identifier:oai:inaoe.repositorioinstitucional.mx:1009/1345
Acceso en línea:http://inaoe.repositorioinstitucional.mx/jspui/handle/1009/1345
Access Level:acceso abierto
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info:eu-repo/classification/cti/22
info:eu-repo/classification/cti/2209
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spelling Micro-optical components: ApplicationsFRANCISCO JAVIER RENERO CARRILLOinfo:eu-repo/classification/cti/1info:eu-repo/classification/cti/22info:eu-repo/classification/cti/2209info:eu-repo/classification/cti/2209The importance of MEMS (and MOEMS) is undeniable nowadays. Indeed, an incredible number of applications are concerned by those components which size is less than 1 mm (portable telephone filters, motors, pumps, airbags, printing systems, sensors, telecommunications, barcode readers etc …). This success can be explained easily if we consider the size of these components but also their low cost, their precision, their robustness, their response time or their high-resonance-frequency which makes them insensitive to vibratory perturbations. Micro-optical components in silicon have been fabricated at INAOE. Those components depend on the wavelength of use and can be used as mirrors or lenses. The goal of my study is to find and to realize applications using these components. I have chosen to present my work in this report in 3 parts. First of all, I will make a description of the micromirrors fabricated at INAOE and most of all I will recall the fabrication techniques which are used. Then, I will give examples of recent applications which use MOEMS. The purpose is to choose one of these applications and try to realize it using the mirrors fabricated at INAOE : this is the last part of this work.Instituto Nacional de Astrofísica, Óptica y Electrónica2007info:eu-repo/semantics/reportinfo:eu-repo/semantics/publishedVersionapplication/pdfhttp://inaoe.repositorioinstitucional.mx/jspui/handle/1009/1345reponame:Repositorio Institucional del INAOEinstname:Instituto Nacional de Astrofísica, Óptica y Electrónicainstacron:INAOEengcitation:Sagarzazu, G. & Renero-Carrillo, F.J. (2007). Micro-optical components: Applications, Reporte Técnico, Instituto Nacional de Astrofísica, Óptica y Electrónicainfo:eu-repo/semantics/openAccesshttp://creativecommons.org/licenses/by-nc-nd/4.0oai:inaoe.repositorioinstitucional.mx:1009/13452024-08-28T03:22:54Z
dc.title.none.fl_str_mv Micro-optical components: Applications
title Micro-optical components: Applications
spellingShingle Micro-optical components: Applications
FRANCISCO JAVIER RENERO CARRILLO
info:eu-repo/classification/cti/1
info:eu-repo/classification/cti/22
info:eu-repo/classification/cti/2209
info:eu-repo/classification/cti/2209
title_short Micro-optical components: Applications
title_full Micro-optical components: Applications
title_fullStr Micro-optical components: Applications
title_full_unstemmed Micro-optical components: Applications
title_sort Micro-optical components: Applications
dc.creator.none.fl_str_mv FRANCISCO JAVIER RENERO CARRILLO
author FRANCISCO JAVIER RENERO CARRILLO
author_facet FRANCISCO JAVIER RENERO CARRILLO
author_role author
dc.subject.none.fl_str_mv info:eu-repo/classification/cti/1
info:eu-repo/classification/cti/22
info:eu-repo/classification/cti/2209
info:eu-repo/classification/cti/2209
topic info:eu-repo/classification/cti/1
info:eu-repo/classification/cti/22
info:eu-repo/classification/cti/2209
info:eu-repo/classification/cti/2209
description The importance of MEMS (and MOEMS) is undeniable nowadays. Indeed, an incredible number of applications are concerned by those components which size is less than 1 mm (portable telephone filters, motors, pumps, airbags, printing systems, sensors, telecommunications, barcode readers etc …). This success can be explained easily if we consider the size of these components but also their low cost, their precision, their robustness, their response time or their high-resonance-frequency which makes them insensitive to vibratory perturbations. Micro-optical components in silicon have been fabricated at INAOE. Those components depend on the wavelength of use and can be used as mirrors or lenses. The goal of my study is to find and to realize applications using these components. I have chosen to present my work in this report in 3 parts. First of all, I will make a description of the micromirrors fabricated at INAOE and most of all I will recall the fabrication techniques which are used. Then, I will give examples of recent applications which use MOEMS. The purpose is to choose one of these applications and try to realize it using the mirrors fabricated at INAOE : this is the last part of this work.
publishDate 2007
dc.date.none.fl_str_mv 2007
dc.type.none.fl_str_mv info:eu-repo/semantics/report
info:eu-repo/semantics/publishedVersion
format report
status_str publishedVersion
dc.identifier.none.fl_str_mv http://inaoe.repositorioinstitucional.mx/jspui/handle/1009/1345
url http://inaoe.repositorioinstitucional.mx/jspui/handle/1009/1345
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv citation:Sagarzazu, G. & Renero-Carrillo, F.J. (2007). Micro-optical components: Applications, Reporte Técnico, Instituto Nacional de Astrofísica, Óptica y Electrónica
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
http://creativecommons.org/licenses/by-nc-nd/4.0
eu_rights_str_mv openAccess
rights_invalid_str_mv http://creativecommons.org/licenses/by-nc-nd/4.0
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Instituto Nacional de Astrofísica, Óptica y Electrónica
publisher.none.fl_str_mv Instituto Nacional de Astrofísica, Óptica y Electrónica
dc.source.none.fl_str_mv reponame:Repositorio Institucional del INAOE
instname:Instituto Nacional de Astrofísica, Óptica y Electrónica
instacron:INAOE
instname_str Instituto Nacional de Astrofísica, Óptica y Electrónica
instacron_str INAOE
institution INAOE
reponame_str Repositorio Institucional del INAOE
collection Repositorio Institucional del INAOE
repository.name.fl_str_mv
repository.mail.fl_str_mv
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