Micro-optical components: Applications
The importance of MEMS (and MOEMS) is undeniable nowadays. Indeed, an incredible number of applications are concerned by those components which size is less than 1 mm (portable telephone filters, motors, pumps, airbags, printing systems, sensors, telecommunications, barcode readers etc …). This succ...
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| Tipo de recurso: | informe técnico |
| Estado: | Versión publicada |
| Fecha de publicación: | 2007 |
| País: | México |
| Institución: | Instituto Nacional de Astrofísica, Óptica y Electrónica |
| Repositorio: | Repositorio Institucional del INAOE |
| Idioma: | inglés |
| OAI Identifier: | oai:inaoe.repositorioinstitucional.mx:1009/1345 |
| Acceso en línea: | http://inaoe.repositorioinstitucional.mx/jspui/handle/1009/1345 |
| Access Level: | acceso abierto |
| Palabra clave: | info:eu-repo/classification/cti/1 info:eu-repo/classification/cti/22 info:eu-repo/classification/cti/2209 |
| Sumario: | The importance of MEMS (and MOEMS) is undeniable nowadays. Indeed, an incredible number of applications are concerned by those components which size is less than 1 mm (portable telephone filters, motors, pumps, airbags, printing systems, sensors, telecommunications, barcode readers etc …). This success can be explained easily if we consider the size of these components but also their low cost, their precision, their robustness, their response time or their high-resonance-frequency which makes them insensitive to vibratory perturbations. Micro-optical components in silicon have been fabricated at INAOE. Those components depend on the wavelength of use and can be used as mirrors or lenses. The goal of my study is to find and to realize applications using these components. I have chosen to present my work in this report in 3 parts. First of all, I will make a description of the micromirrors fabricated at INAOE and most of all I will recall the fabrication techniques which are used. Then, I will give examples of recent applications which use MOEMS. The purpose is to choose one of these applications and try to realize it using the mirrors fabricated at INAOE : this is the last part of this work. |
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