Caracterización de microactuadores tipo chevron fabricados con la tecnología PolyMEMS-INAOE
PolyMEMS-INAOE is a surface micromachining technology for micromechanics device fabrication, which is based on polysilicon films as structural material and featured by 5-microns as minimum size. This technology offers fabrication capacities of electrostatic and Joule effect actuators, residual stres...
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| Tipo de recurso: | tesis de maestría |
| Estado: | Versión aceptada para publicación |
| Fecha de publicación: | 2011 |
| País: | México |
| Institución: | Instituto Nacional de Astrofísica, Óptica y Electrónica |
| Repositorio: | Repositorio Institucional del INAOE |
| Idioma: | español |
| OAI Identifier: | oai:inaoe.repositorioinstitucional.mx:1009/654 |
| Acceso en línea: | http://inaoe.repositorioinstitucional.mx/jspui/handle/1009/654 |
| Access Level: | acceso abierto |
| Palabra clave: | info:eu-repo/classification/Dispositivos micromecánicos/Micromechanical devices info:eu-repo/classification/Modelado/Modelling info:eu-repo/classification/Microactuators/Microactuators info:eu-repo/classification/Chevron/Chevron info:eu-repo/classification/cti/1 info:eu-repo/classification/cti/22 info:eu-repo/classification/cti/2203 |
| Sumario: | PolyMEMS-INAOE is a surface micromachining technology for micromechanics device fabrication, which is based on polysilicon films as structural material and featured by 5-microns as minimum size. This technology offers fabrication capacities of electrostatic and Joule effect actuators, residual stress test structures, and some other specific purpose structures. Currently, some of such structures are under characterization and modeling. The objective of this M. Sc. Thesis is stated as follows: Using several approaches, the study is conducted in order to obtain the characterization of chevron type actuators; this purpose is attained considering several key device parameters and polysilicon structural properties. In the pursuit of this goal, the lay out, fabrication details, characterization techniques, and physics of operation, all of them were considered. The chevron actuators were analyzed based on both, analytic and simulation techniques, and additionally considering a parameter analysis approach (polysilicon conductivity, Young’s modulus, thermal expansion coefficient, etc.). The simulation process comprises variations in the chevron mechanical arrangement: length arms, mechanical angle, and width/length of the shuttle. This broad simulation task was performed in order to analyze some issues related with operating temperature distribution, pushing force, and overall displacement. In the last stage of this study, several actuators were experimentally analyzed, both on wafer and also mounted on PCB. Simulation and analytic approach were validated. Finally, a proposed “on-chip” design for measuring the pushing force of these actuators is discussed. Hz @1 MHz. Por su parte, la banda de frecuencia cubre desde 3.192 a 7.501 GHz, generando un FTR de 80.39 %. Por otra parte, la respuesta transitoria muestra un tiempo de arranque, transición y asentamiento de 250, 300 y 600 ps respectivamente. Por último, los resultados del análisis estadístico dan una media y una desviación estándar de 5.381 GHz y 411.03 MHz para la frecuencia central respectivamente. |
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