Fabricación y caracterización de estructuras capacitivas para monitorear presión
In the last years, at the INAOE Microelectronics Laboratory have been developed different stages from manufacture of microstructures for the innovation in Microelectromechanical Systems from the technology PolyMEMS INAOE. Combining Surface micromachining and Polysilicon as structural material, it is...
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| Tipo de recurso: | tesis de maestría |
| Estado: | Versión aceptada para publicación |
| Fecha de publicación: | 2010 |
| País: | México |
| Institución: | Instituto Nacional de Astrofísica, Óptica y Electrónica |
| Repositorio: | Repositorio Institucional del INAOE |
| Idioma: | español |
| OAI Identifier: | oai:inaoe.repositorioinstitucional.mx:1009/501 |
| Acceso en línea: | http://inaoe.repositorioinstitucional.mx/jspui/handle/1009/501 |
| Access Level: | acceso abierto |
| Palabra clave: | info:eu-repo/classification/Sensor de presión capacitivo/Capacitive pressure sensor info:eu-repo/classification/Dispositivo micromecánico/Micromechanical device info:eu-repo/classification/Presión intraocular/Intraocular pressure info:eu-repo/classification/cti/1 info:eu-repo/classification/cti/22 info:eu-repo/classification/cti/2203 |
| Sumario: | In the last years, at the INAOE Microelectronics Laboratory have been developed different stages from manufacture of microstructures for the innovation in Microelectromechanical Systems from the technology PolyMEMS INAOE. Combining Surface micromachining and Polysilicon as structural material, it is possible to boost development of the national electronic industry, in the manufacture of sensors and actuators that facilitate their integration with integrated circuits for diverse applications. At present, the main interest in the development of MEMS devices is not only in its capacity of adaptation in industrial applications, but also in the possibility of offering solutions to biomedical problems, such as, biological tests, medical diagnoses, providing drugs, as a stimulating neuromuscular, among others BioMEMS. The present thesis work arises from the necessity to offer a solution to the problem of the Glaucoma, this disease is associated essentially to an increase in the intraocular pressure that causes a progressive injury to the optical nerve, and consequently it causes blindness. In this context, this thesis is focused on to design, to manufacture and to characterize capacitive structures to measure pressure and to determine the effects of the glaucoma. |
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