EELS characterization of TiN grown by the DC sputtering technique
Titanium nitride thin films were deposited on monocrystalline silicon (mc-Si) substrates by direct current reactive magnetron sputtering. Auger electron spectra (AES) of deposited films at different nitrogen partial pressures, show the typical N KL23L23 and Ti L3M23M23 Auger transition overlapping....
| Autores: | , |
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| Tipo de recurso: | artículo |
| Estado: | Versión enviada para evaluación y publicación |
| Fecha de publicación: | 1999 |
| País: | México |
| Institución: | Centro de Investigación en Materiales Avanzados |
| Repositorio: | Fuente de Objetos Científicos Open Access del CIMAV |
| Idioma: | inglés |
| OAI Identifier: | oai:cimav.repositorioinstitucional.mx:1004/956 |
| Acceso en línea: | http://cimav.repositorioinstitucional.mx/jspui/handle/1004/956 |
| Access Level: | acceso abierto |
| Palabra clave: | info:eu-repo/classification/EELS/TiN info:eu-repo/classification/RDF/EXELFS info:eu-repo/classification/cti/1 info:eu-repo/classification/cti/22 info:eu-repo/classification/cti/2299 info:eu-repo/classification/cti/229999 |
| Sumario: | Titanium nitride thin films were deposited on monocrystalline silicon (mc-Si) substrates by direct current reactive magnetron sputtering. Auger electron spectra (AES) of deposited films at different nitrogen partial pressures, show the typical N KL23L23 and Ti L3M23M23 Auger transition overlapping. Also, changes in the Ti L3M23M45 Auger transition peak are observed. X-ray diffraction and high resolution electron microscopy (HRTEM) of a golden color TiN/ mc-Si sample, reveal a preferential polycrystalline columnar growth in the k111l orientation. This sample was also analyzed by electron energy-loss spectroscopy (EELS). The N/Ti elemental ratio is slightly different to the value determined by AES. Atomic distribution around the N atoms is in agreement with that expected from the N atom in the fcc unit cell of TiN. This distribution was obtained via an extended energy-loss fine structure (EXELFS) analysis from EELS spectra. |
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