An Integrated ISFET pH Microsensor on a CMOS Standard Process

We present the design and integration of a nine-pH microsensor array on a single silicon substrate with its own signal readout circuit, integrated in a 0.6-μm commercial standard complementary metal oxide semiconductor (CMOS) process. An ion sensitive field effect transistor (ISFET) has been used as...

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Detalles Bibliográficos
Autores: JOHAN JAIR ESTRADA LOPEZ, ROSA MARIA WOO GARCIA, AGUSTIN LEOBARDO HERRERA MAY
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2013
País:México
Institución:Universidad Autónoma de Yucatán
Repositorio:Repositorio Digital Institucional de la Universidad Autónoma de Yucatán
Idioma:inglés
OAI Identifier:oai:redi.uady.mx:123456789/534
Acceso en línea:http://redi.uady.mx:8080/handle/123456789/534
Access Level:acceso abierto
Palabra clave:info:eu-repo/classification/cti/1
info:eu-repo/classification/cti/7
CMOS
Instrumentation Amplifier
ISFET
PH
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spelling An Integrated ISFET pH Microsensor on a CMOS Standard ProcessJOHAN JAIR ESTRADA LOPEZROSA MARIA WOO GARCIAAGUSTIN LEOBARDO HERRERA MAYinfo:eu-repo/classification/cti/1info:eu-repo/classification/cti/7CMOSInstrumentation AmplifierISFETPHWe present the design and integration of a nine-pH microsensor array on a single silicon substrate with its own signal readout circuit, integrated in a 0.6-μm commercial standard complementary metal oxide semiconductor (CMOS) process. An ion sensitive field effect transistor (ISFET) has been used as pH microsensor and an instrumentation amplifier as the read-out circuit. The ISFET structure is conformed by the channel length and ratio of MOS transistor, gate extended and the selective membrane, for which silicon nitride (Si3N4) is employed as an ion selective element. The complete design includes shielding around the pH microsensor and the readout circuit to avoid leakage of current to the substrate. The readout circuit is composed by three operational amplifiers and resistances that form the instrumentation amplifier, with a ±2.5 V bias has a 50 dB gain, power supply rejection ratio (PSSR) of 120 dB and common mode rejection ratio (CMRR) of 127 dB. The complete system is integrated in a 1.12 mm2 silicon area; it presents a 59 mV/pH linearity, within a concentration range of 2 to 12 of pH level, making it a good alternative for biological or medical applications.2013-09-30info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionapplication/pdfhttp://redi.uady.mx:8080/handle/123456789/534urn:issn:2161-122xreponame:Repositorio Digital Institucional de la Universidad Autónoma de Yucatáninstname:Universidad Autónoma de Yucatáninstacron:UADYengInvestigación aplicadainfo:eu-repo/semantics/openAccesshttp://creativecommons.org/licenses/by-nc-nd/4.0oai:redi.uady.mx:123456789/5342024-10-04T19:03:13Z
dc.title.none.fl_str_mv An Integrated ISFET pH Microsensor on a CMOS Standard Process
title An Integrated ISFET pH Microsensor on a CMOS Standard Process
spellingShingle An Integrated ISFET pH Microsensor on a CMOS Standard Process
JOHAN JAIR ESTRADA LOPEZ
info:eu-repo/classification/cti/1
info:eu-repo/classification/cti/7
CMOS
Instrumentation Amplifier
ISFET
PH
title_short An Integrated ISFET pH Microsensor on a CMOS Standard Process
title_full An Integrated ISFET pH Microsensor on a CMOS Standard Process
title_fullStr An Integrated ISFET pH Microsensor on a CMOS Standard Process
title_full_unstemmed An Integrated ISFET pH Microsensor on a CMOS Standard Process
title_sort An Integrated ISFET pH Microsensor on a CMOS Standard Process
dc.creator.none.fl_str_mv JOHAN JAIR ESTRADA LOPEZ
ROSA MARIA WOO GARCIA
AGUSTIN LEOBARDO HERRERA MAY
author JOHAN JAIR ESTRADA LOPEZ
author_facet JOHAN JAIR ESTRADA LOPEZ
ROSA MARIA WOO GARCIA
AGUSTIN LEOBARDO HERRERA MAY
author_role author
author2 ROSA MARIA WOO GARCIA
AGUSTIN LEOBARDO HERRERA MAY
author2_role author
author
dc.subject.none.fl_str_mv info:eu-repo/classification/cti/1
info:eu-repo/classification/cti/7
CMOS
Instrumentation Amplifier
ISFET
PH
topic info:eu-repo/classification/cti/1
info:eu-repo/classification/cti/7
CMOS
Instrumentation Amplifier
ISFET
PH
description We present the design and integration of a nine-pH microsensor array on a single silicon substrate with its own signal readout circuit, integrated in a 0.6-μm commercial standard complementary metal oxide semiconductor (CMOS) process. An ion sensitive field effect transistor (ISFET) has been used as pH microsensor and an instrumentation amplifier as the read-out circuit. The ISFET structure is conformed by the channel length and ratio of MOS transistor, gate extended and the selective membrane, for which silicon nitride (Si3N4) is employed as an ion selective element. The complete design includes shielding around the pH microsensor and the readout circuit to avoid leakage of current to the substrate. The readout circuit is composed by three operational amplifiers and resistances that form the instrumentation amplifier, with a ±2.5 V bias has a 50 dB gain, power supply rejection ratio (PSSR) of 120 dB and common mode rejection ratio (CMRR) of 127 dB. The complete system is integrated in a 1.12 mm2 silicon area; it presents a 59 mV/pH linearity, within a concentration range of 2 to 12 of pH level, making it a good alternative for biological or medical applications.
publishDate 2013
dc.date.none.fl_str_mv 2013-09-30
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://redi.uady.mx:8080/handle/123456789/534
url http://redi.uady.mx:8080/handle/123456789/534
dc.language.none.fl_str_mv eng
language eng
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
http://creativecommons.org/licenses/by-nc-nd/4.0
eu_rights_str_mv openAccess
rights_invalid_str_mv http://creativecommons.org/licenses/by-nc-nd/4.0
dc.format.none.fl_str_mv application/pdf
dc.coverage.none.fl_str_mv Investigación aplicada
dc.source.none.fl_str_mv urn:issn:2161-122x
reponame:Repositorio Digital Institucional de la Universidad Autónoma de Yucatán
instname:Universidad Autónoma de Yucatán
instacron:UADY
instname_str Universidad Autónoma de Yucatán
instacron_str UADY
institution UADY
reponame_str Repositorio Digital Institucional de la Universidad Autónoma de Yucatán
collection Repositorio Digital Institucional de la Universidad Autónoma de Yucatán
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15,812429

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