Evaluation of bias voltage-dependent mechanical properties of amorphous TiSi2 thin films on PEEK by nano-characterization techniques

Thin films on PEEK have been designing by magnetron sputtering, using bias voltages ranging from −31 to −157 V. The X-ray diffraction and EDX show how the amorphous films resulting have an elemental composition very close to the stoichiometry TiSi. The AFM and SEM performed on top and cross-section,...

Descripción completa

Detalles Bibliográficos
Autores: Frutos, E., Serra, R., Jiménez, José Antonio
Tipo de recurso: artículo
Estado:Versión aceptada para publicación
Fecha de publicación:2021
País:España
Institución:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/251046
Acceso en línea:http://hdl.handle.net/10261/251046
Access Level:acceso abierto
Palabra clave:Residual stresses
Sputtering thin film coatings
Scratch resistance
Fracture toughness
Nano-indentation
Load-bearing transfer applications
Descripción
Sumario:Thin films on PEEK have been designing by magnetron sputtering, using bias voltages ranging from −31 to −157 V. The X-ray diffraction and EDX show how the amorphous films resulting have an elemental composition very close to the stoichiometry TiSi. The AFM and SEM performed on top and cross-section, respectively, of film reveal a smooth and uniform surface, free of pores and cracks, and a compact microstructure. The evaluation of the resolved shear stress, yield strength, hardness, scratch resistance, and fracture toughness show how these values increase in the TiSi/PEEK system as the bias voltage increase. The development of these hard and tough thin films has enabled the fracture toughness achieved by the TiSi/PEEK system increase when a bias voltage equal to or higher than −108 V is used during the deposition process. For these bias conditions, the compressive residual stresses generated are large enough to prevent crack nucleation. The increase of the crack resistance gives as a result that K reaches values above 32 MPa*m. This value is much greater than those values corresponding to the classic ceramic coatings, such as AlO (4.6 MPa*m) and ZrO (7.6 MPa*m).