Real-time optical dimensional metrology via diffractometry for nanofabrication

Surface patterning technologies represent a worldwide growing industry, creating smart surfaces and micro/nanoscale device. The advent of large-area, high-speed imprinting technologies has created an ever-growing need for rapid and non-destructive dimensional metrology techniques to keep pace with t...

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Autores: Whitworth, Guy L.|||0000-0002-5060-6946, Francone, Achille|||0000-0001-7757-9901, Sotomayor Torres, Clivia M.|||0000-0001-9986-2716, Kehagias, Nikolaos|||0000-0002-2698-383X
Tipo de recurso: artículo
Fecha de publicación:2020
País:España
Institución:Universitat Autònoma de Barcelona
Repositorio:Dipòsit Digital de Documents de la UAB
Idioma:inglés
OAI Identifier:oai:ddd.uab.cat:233993
Acceso en línea:https://ddd.uab.cat/record/233993
https://dx.doi.org/urn:doi:10.1038/s41598-020-61975-3
Access Level:acceso abierto
Palabra clave:Nanometrology
Optical techniques
Techniques and instrumentation
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spelling Real-time optical dimensional metrology via diffractometry for nanofabricationWhitworth, Guy L.|||0000-0002-5060-6946Francone, Achille|||0000-0001-7757-9901Sotomayor Torres, Clivia M.|||0000-0001-9986-2716Kehagias, Nikolaos|||0000-0002-2698-383XNanometrologyOptical techniquesTechniques and instrumentationSurface patterning technologies represent a worldwide growing industry, creating smart surfaces and micro/nanoscale device. The advent of large-area, high-speed imprinting technologies has created an ever-growing need for rapid and non-destructive dimensional metrology techniques to keep pace with the speed of production. Here we present a new real-time optical scatterometry technique, applicable at the mesoscale when optical inspection produces multiple orders of diffraction. We validate this method by inspecting multiple silicon gratings with a variety of structural parameters. These measurements are cross-referenced with FIB, SEM and scanning stylus profilometry. Finally, we measure thermally imprinted structures as a function of imprinting temperature in order to demonstrate the method suitable for in-line quality control in nanoimprint lithography. 22020-01-0120202020-01-01Articlehttp://purl.org/coar/resource_type/c_6501VoRhttp://purl.org/coar/version/c_970fb48d4fbd8a85info:eu-repo/semantics/articleapplication/pdfhttps://ddd.uab.cat/record/233993https://dx.doi.org/urn:doi:10.1038/s41598-020-61975-3reponame:Dipòsit Digital de Documents de la UABinstname:Universitat Autònoma de BarcelonaInglésengEuropean Commission https://doi.org/10.13039/501100000780 721062Agencia Estatal de Investigación https://doi.org/10.13039/501100011033 PGC2018-101743-B-I00Ministerio de Economía y Competitividad https://doi.org/10.13039/501100003329 SEV-2017-0706open accesshttp://purl.org/coar/access_right/c_abf2Aquest document està subjecte a una llicència d'ús Creative Commons. Es permet la reproducció total o parcial, la distribució, la comunicació pública de l'obra i la creació d'obres derivades, fins i tot amb finalitats comercials, sempre i quan es reconegui l'autoria de l'obra original.https://creativecommons.org/licenses/by/4.0/info:eu-repo/semantics/openAccessoai:ddd.uab.cat:2339932026-06-06T12:50:31Z
dc.title.none.fl_str_mv Real-time optical dimensional metrology via diffractometry for nanofabrication
title Real-time optical dimensional metrology via diffractometry for nanofabrication
spellingShingle Real-time optical dimensional metrology via diffractometry for nanofabrication
Whitworth, Guy L.|||0000-0002-5060-6946
Nanometrology
Optical techniques
Techniques and instrumentation
title_short Real-time optical dimensional metrology via diffractometry for nanofabrication
title_full Real-time optical dimensional metrology via diffractometry for nanofabrication
title_fullStr Real-time optical dimensional metrology via diffractometry for nanofabrication
title_full_unstemmed Real-time optical dimensional metrology via diffractometry for nanofabrication
title_sort Real-time optical dimensional metrology via diffractometry for nanofabrication
dc.creator.none.fl_str_mv Whitworth, Guy L.|||0000-0002-5060-6946
Francone, Achille|||0000-0001-7757-9901
Sotomayor Torres, Clivia M.|||0000-0001-9986-2716
Kehagias, Nikolaos|||0000-0002-2698-383X
author Whitworth, Guy L.|||0000-0002-5060-6946
author_facet Whitworth, Guy L.|||0000-0002-5060-6946
Francone, Achille|||0000-0001-7757-9901
Sotomayor Torres, Clivia M.|||0000-0001-9986-2716
Kehagias, Nikolaos|||0000-0002-2698-383X
author_role author
author2 Francone, Achille|||0000-0001-7757-9901
Sotomayor Torres, Clivia M.|||0000-0001-9986-2716
Kehagias, Nikolaos|||0000-0002-2698-383X
author2_role author
author
author
dc.subject.none.fl_str_mv Nanometrology
Optical techniques
Techniques and instrumentation
topic Nanometrology
Optical techniques
Techniques and instrumentation
description Surface patterning technologies represent a worldwide growing industry, creating smart surfaces and micro/nanoscale device. The advent of large-area, high-speed imprinting technologies has created an ever-growing need for rapid and non-destructive dimensional metrology techniques to keep pace with the speed of production. Here we present a new real-time optical scatterometry technique, applicable at the mesoscale when optical inspection produces multiple orders of diffraction. We validate this method by inspecting multiple silicon gratings with a variety of structural parameters. These measurements are cross-referenced with FIB, SEM and scanning stylus profilometry. Finally, we measure thermally imprinted structures as a function of imprinting temperature in order to demonstrate the method suitable for in-line quality control in nanoimprint lithography.
publishDate 2020
dc.date.none.fl_str_mv 2
2020-01-01
2020
2020-01-01
dc.type.none.fl_str_mv Article
http://purl.org/coar/resource_type/c_6501
VoR
http://purl.org/coar/version/c_970fb48d4fbd8a85
dc.type.openaire.fl_str_mv info:eu-repo/semantics/article
format article
dc.identifier.none.fl_str_mv https://ddd.uab.cat/record/233993
https://dx.doi.org/urn:doi:10.1038/s41598-020-61975-3
url https://ddd.uab.cat/record/233993
https://dx.doi.org/urn:doi:10.1038/s41598-020-61975-3
dc.language.none.fl_str_mv Inglés
eng
language_invalid_str_mv Inglés
language eng
dc.relation.none.fl_str_mv European Commission https://doi.org/10.13039/501100000780 721062
Agencia Estatal de Investigación https://doi.org/10.13039/501100011033 PGC2018-101743-B-I00
Ministerio de Economía y Competitividad https://doi.org/10.13039/501100003329 SEV-2017-0706
dc.rights.none.fl_str_mv open access
http://purl.org/coar/access_right/c_abf2
https://creativecommons.org/licenses/by/4.0/
dc.rights.openaire.fl_str_mv info:eu-repo/semantics/openAccess
rights_invalid_str_mv open access
http://purl.org/coar/access_right/c_abf2
https://creativecommons.org/licenses/by/4.0/
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.source.none.fl_str_mv reponame:Dipòsit Digital de Documents de la UAB
instname:Universitat Autònoma de Barcelona
instname_str Universitat Autònoma de Barcelona
reponame_str Dipòsit Digital de Documents de la UAB
collection Dipòsit Digital de Documents de la UAB
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