Butt coupled microcantilever in sensing applications

14 páginas, 9 figuras.-- Trabajo presentado en la conferencia "MEMS, MOEMS, and Micromachining II"; 3-Abril-2006; Strasbourg, France; Editores: Hakan Ürey, Ayman El-Fatatry.

Detalles Bibliográficos
Autores: Zinoviev, Kirill, Plaza, José Antonio, Cadarso Busto, Víctor Javier, Lechuga, Laura M., Domínguez Horna, Carlos
Tipo de recurso: artículo
Fecha de publicación:2006
País:España
Institución:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/27972
Acceso en línea:http://hdl.handle.net/10261/27972
Access Level:acceso abierto
Palabra clave:Microcantilevers
Butt coupled optical waveguides
Biosensors
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spelling Butt coupled microcantilever in sensing applicationsZinoviev, KirillPlaza, José AntonioCadarso Busto, Víctor JavierLechuga, Laura M.Domínguez Horna, CarlosMicrocantileversButt coupled optical waveguidesBiosensors14 páginas, 9 figuras.-- Trabajo presentado en la conferencia "MEMS, MOEMS, and Micromachining II"; 3-Abril-2006; Strasbourg, France; Editores: Hakan Ürey, Ayman El-Fatatry.Butt coupled optical waveguides are well known in integrated optics by high sensitivity of energy transfer to their misalignment with respect to each other. This might be detrimental if efficient and firm coupling from one light guide to another is needed, for example, coupling from a fiber to a waveguide on chip. However, this phenomena is efficiently used for sensing applications, where small misalignment between two objects provided with the waveguides can be detected. In this work we studied the abilities of this method to detection of ultrasmall displacements of microcantilevers frequently used in biological research. In the proposed design the cantilever itself acts as a waveguide operated in visible range. The simulations demonstrated ability to detect cantilever deflections with sensitivity of 18 fm/Hz1/2. The capability of detection with subangstrom resolution in the dynamic mode was demonstrated experimentally in air. The preliminary experiments in liquids are presented. The technique can be considered as an alternative to the known methods used for read-out of response of microcantilevers to external nanomechanical forces exerted on them.The work has been done within the Optonanogen project supported by EC, IST-2001-37239.Peer reviewedThe International Society for Optics and PhotonicsConsejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]201020102006info:eu-repo/semantics/articlehttp://purl.org/coar/resource_type/c_6501520731 bytesapplication/pdfhttp://hdl.handle.net/10261/27972reponame:DIGITAL.CSIC. Repositorio Institucional del CSICinstname:Consejo Superior de Investigaciones Científicas (CSIC)Ingléshttp://dx.doi.org/10.1117/12.662393Síinfo:eu-repo/semantics/openAccessoai:digital.csic.es:10261/279722026-05-22T06:33:51Z
dc.title.none.fl_str_mv Butt coupled microcantilever in sensing applications
title Butt coupled microcantilever in sensing applications
spellingShingle Butt coupled microcantilever in sensing applications
Zinoviev, Kirill
Microcantilevers
Butt coupled optical waveguides
Biosensors
title_short Butt coupled microcantilever in sensing applications
title_full Butt coupled microcantilever in sensing applications
title_fullStr Butt coupled microcantilever in sensing applications
title_full_unstemmed Butt coupled microcantilever in sensing applications
title_sort Butt coupled microcantilever in sensing applications
dc.creator.none.fl_str_mv Zinoviev, Kirill
Plaza, José Antonio
Cadarso Busto, Víctor Javier
Lechuga, Laura M.
Domínguez Horna, Carlos
author Zinoviev, Kirill
author_facet Zinoviev, Kirill
Plaza, José Antonio
Cadarso Busto, Víctor Javier
Lechuga, Laura M.
Domínguez Horna, Carlos
author_role author
author2 Plaza, José Antonio
Cadarso Busto, Víctor Javier
Lechuga, Laura M.
Domínguez Horna, Carlos
author2_role author
author
author
author
dc.contributor.none.fl_str_mv Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]
dc.subject.none.fl_str_mv Microcantilevers
Butt coupled optical waveguides
Biosensors
topic Microcantilevers
Butt coupled optical waveguides
Biosensors
description 14 páginas, 9 figuras.-- Trabajo presentado en la conferencia "MEMS, MOEMS, and Micromachining II"; 3-Abril-2006; Strasbourg, France; Editores: Hakan Ürey, Ayman El-Fatatry.
publishDate 2006
dc.date.none.fl_str_mv 2006
2010
2010
dc.type.none.fl_str_mv info:eu-repo/semantics/article
http://purl.org/coar/resource_type/c_6501
format article
dc.identifier.none.fl_str_mv http://hdl.handle.net/10261/27972
url http://hdl.handle.net/10261/27972
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv http://dx.doi.org/10.1117/12.662393
Sí
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv 520731 bytes
application/pdf
dc.publisher.none.fl_str_mv The International Society for Optics and Photonics
publisher.none.fl_str_mv The International Society for Optics and Photonics
dc.source.none.fl_str_mv reponame:DIGITAL.CSIC. Repositorio Institucional del CSIC
instname:Consejo Superior de Investigaciones Científicas (CSIC)
instname_str Consejo Superior de Investigaciones Científicas (CSIC)
reponame_str DIGITAL.CSIC. Repositorio Institucional del CSIC
collection DIGITAL.CSIC. Repositorio Institucional del CSIC
repository.name.fl_str_mv
repository.mail.fl_str_mv
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