Fine speckle contrast in InGaAs/InP systems: Influence of layer thickness, missmatch, and growing temperature

This work is focused on the study of the fine speckle contrast present in planar view observations of matched and mismatched InGaAs layers grown by molecular beam epitaxy on InP substrates. Our results provide experimental evidence of the evolution of this fine structure with the mismatch, layer thi...

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Detalles Bibliográficos
Autores: Peiró Martínez, Francisca, Cornet i Calveras, Albert, Herms Berenguer, Atilà, Morante i Lleonart, Joan Ramon, Clark, S. A., Williams, R. H.
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:1993
País:España
Institución:Varias* (Consorci de Biblioteques Universitáries de Catalunya, Centre de Serveis Científics i Acadèmics de Catalunya)
Repositorio:Recercat. Dipósit de la Recerca de Catalunya
OAI Identifier:oai:recercat.cat:2445/32222
Acceso en línea:https://hdl.handle.net/2445/32222
Access Level:acceso abierto
Palabra clave:Pel·lícules fines
Feixos moleculars
Nanotecnologia
Thin films
Molecular beams
Nanotechnology
Descripción
Sumario:This work is focused on the study of the fine speckle contrast present in planar view observations of matched and mismatched InGaAs layers grown by molecular beam epitaxy on InP substrates. Our results provide experimental evidence of the evolution of this fine structure with the mismatch, layer thickness, and growth temperature. The correlation of the influence of all these parameters on the appearance of the contrast modulation points to the development of the fine structure during the growth. Moreover, as growth proceeds, this structure shows a dynamic behavior which depends on the intrinsic layer substrate stress.