Amorphization and Ablation of Crystalline Silicon Using Ultrafast Lasers: Dependencies on the Pulse Duration and Irradiation Wavelength

17 pags., 10 figs., 2 tabs.

Bibliographic Details
Authors: García-Lechuga, Mario, Casquero, Noemi, Siegel, Jan, Solís Céspedes, Javier, Clady, Raphael, Wang, Andong, Utéza, Olivier, Grojo, David
Format: article
Status:Published version
Publication Date:2024
Country:España
Institution:Consejo Superior de Investigaciones Científicas (CSIC)
Repository:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/371625
Online Access:http://hdl.handle.net/10261/371625
https://api.elsevier.com/content/abstract/scopus_id/85197253274
Access Level:Open access
Keyword:Femtosecond laser-matter interactions
Few-optical-cycle pulses
Silicon amorphization
Silicon photonics
Wavelength tunable lasers
id ES_e1dc7f023ba0cf5bd871ffcf5a47abe7
oai_identifier_str oai:digital.csic.es:10261/371625
network_acronym_str ES
network_name_str España
repository_id_str
spelling Amorphization and Ablation of Crystalline Silicon Using Ultrafast Lasers: Dependencies on the Pulse Duration and Irradiation WavelengthGarcía-Lechuga, MarioCasquero, NoemiSiegel, JanSolís Céspedes, JavierClady, RaphaelWang, AndongUtéza, OlivierGrojo, DavidFemtosecond laser-matter interactionsFew-optical-cycle pulsesSilicon amorphizationSilicon photonicsWavelength tunable lasers17 pags., 10 figs., 2 tabs.Using lasers to achieve controlled crystallographic phase changes in silicon with high spatial precision promises new manufacturing solutions in semiconductor technologies, including silicon photonics. Recent demonstrations of improved amorphization thicknesses position ultrafast lasers as an optimum tool to meet current challenges. Here, the literature on silicon transformations is reviewed and complemented with new experimental data. This includes amorphization and ablation response as a function of pulse duration (τ = 13.9 to 134 fs at λ = 800 nm) and laser wavelength (λ = 258 to 4000 nm with τ = 200 fs pulses). For pulse duration-dependent studies on Si(111), the amorphization fluence threshold decreases with shorter durations, emphasizing the significance of non-linear absorption in the range of considered conditions. For wavelength-dependent studies, the amorphization threshold increases sharply from λ = 258 to 1030 nm, followed by near-constant behavior up to λ = 3000 nm. Conversely, the ablation threshold fluence increases in these specified ranges. Differences in the obtained amorphization thicknesses on Si(111) and Si(100) are also discussed, identifying an anomalously large fluence range for amorphization at λ = 258 nm. Finally, the question of the lateral resolution, shown as independent of the interaction nonlinearity is addressed.This work was conducted using ASUR and LaMP facilities at LP3. It has been supported by the European Union’s H2020 program (Grant agree-ments Laserlab-Europe No 871124 [project CNRS-LP3002792 and CNRS-LP300258] and ERC No 871124), grant HyperSolar (TED2021−130894B-C22) funded by MCIN/AEI/10.13039/501100011033 by “European UnionNextGenerationEU/PRTR”, grant ULS_PSB (PID2020-112770RB-C21)funded by MCIN/AEI/10.13039/501100011033, .and grant ANR-23-CE08-0029-03 funded by French National Research Agency (ANR). It was also partially funded by the CSIC through the call for internationalization i-LINK2022 (project ILINK22056). N. Casquero acknowledges a pre-doctoral fel-lowship from the MICINN. The authors acknowledge F. Chacón (Institutode Óptica, CSIC) for AFM measurement.Peer reviewedWiley-VCHEuropean CommissionCentre National de la Recherche Scientifique (France)Ministerio de Ciencia e Innovación (España)Agence Nationale de la Recherche (France)Consejo Superior de Investigaciones Científicas (España)García-Lechuga, Mario [0000-0002-9642-2982]#NODATA##NODATA##NODATA##NODATA##NODATA##NODATA##NODATA#Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]202420242024info:eu-repo/semantics/articlehttp://purl.org/coar/resource_type/c_6501Publisher's versioninfo:eu-repo/semantics/publishedVersionhttp://hdl.handle.net/10261/371625https://api.elsevier.com/content/abstract/scopus_id/85197253274reponame:DIGITAL.CSIC. Repositorio Institucional del CSICinstname:Consejo Superior de Investigaciones Científicas (CSIC)Inglés#PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE#info:eu-repo/grantAgreement/EC/H2020/871124info:eu-repo/grantAgreement/AEI//TED2021−130894B-C22info:eu-repo/grantAgreement/AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2017-2020/PID2020-112770RB-C21Laser and Photonics Reviewshttps://doi.org/10.1002/lpor.202301327Síinfo:eu-repo/semantics/openAccessoai:digital.csic.es:10261/3716252026-05-22T06:33:51Z
dc.title.none.fl_str_mv Amorphization and Ablation of Crystalline Silicon Using Ultrafast Lasers: Dependencies on the Pulse Duration and Irradiation Wavelength
title Amorphization and Ablation of Crystalline Silicon Using Ultrafast Lasers: Dependencies on the Pulse Duration and Irradiation Wavelength
spellingShingle Amorphization and Ablation of Crystalline Silicon Using Ultrafast Lasers: Dependencies on the Pulse Duration and Irradiation Wavelength
García-Lechuga, Mario
Femtosecond laser-matter interactions
Few-optical-cycle pulses
Silicon amorphization
Silicon photonics
Wavelength tunable lasers
title_short Amorphization and Ablation of Crystalline Silicon Using Ultrafast Lasers: Dependencies on the Pulse Duration and Irradiation Wavelength
title_full Amorphization and Ablation of Crystalline Silicon Using Ultrafast Lasers: Dependencies on the Pulse Duration and Irradiation Wavelength
title_fullStr Amorphization and Ablation of Crystalline Silicon Using Ultrafast Lasers: Dependencies on the Pulse Duration and Irradiation Wavelength
title_full_unstemmed Amorphization and Ablation of Crystalline Silicon Using Ultrafast Lasers: Dependencies on the Pulse Duration and Irradiation Wavelength
title_sort Amorphization and Ablation of Crystalline Silicon Using Ultrafast Lasers: Dependencies on the Pulse Duration and Irradiation Wavelength
dc.creator.none.fl_str_mv García-Lechuga, Mario
Casquero, Noemi
Siegel, Jan
Solís Céspedes, Javier
Clady, Raphael
Wang, Andong
Utéza, Olivier
Grojo, David
author García-Lechuga, Mario
author_facet García-Lechuga, Mario
Casquero, Noemi
Siegel, Jan
Solís Céspedes, Javier
Clady, Raphael
Wang, Andong
Utéza, Olivier
Grojo, David
author_role author
author2 Casquero, Noemi
Siegel, Jan
Solís Céspedes, Javier
Clady, Raphael
Wang, Andong
Utéza, Olivier
Grojo, David
author2_role author
author
author
author
author
author
author
dc.contributor.none.fl_str_mv European Commission
Centre National de la Recherche Scientifique (France)
Ministerio de Ciencia e Innovación (España)
Agence Nationale de la Recherche (France)
Consejo Superior de Investigaciones Científicas (España)
García-Lechuga, Mario [0000-0002-9642-2982]
#NODATA#
#NODATA#
#NODATA#
#NODATA#
#NODATA#
#NODATA#
#NODATA#
Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]
dc.subject.none.fl_str_mv Femtosecond laser-matter interactions
Few-optical-cycle pulses
Silicon amorphization
Silicon photonics
Wavelength tunable lasers
topic Femtosecond laser-matter interactions
Few-optical-cycle pulses
Silicon amorphization
Silicon photonics
Wavelength tunable lasers
description 17 pags., 10 figs., 2 tabs.
publishDate 2024
dc.date.none.fl_str_mv 2024
2024
2024
dc.type.none.fl_str_mv info:eu-repo/semantics/article
http://purl.org/coar/resource_type/c_6501
Publisher's version
info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/10261/371625
https://api.elsevier.com/content/abstract/scopus_id/85197253274
url http://hdl.handle.net/10261/371625
https://api.elsevier.com/content/abstract/scopus_id/85197253274
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv #PLACEHOLDER_PARENT_METADATA_VALUE#
#PLACEHOLDER_PARENT_METADATA_VALUE#
#PLACEHOLDER_PARENT_METADATA_VALUE#
info:eu-repo/grantAgreement/EC/H2020/871124
info:eu-repo/grantAgreement/AEI//TED2021−130894B-C22
info:eu-repo/grantAgreement/AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2017-2020/PID2020-112770RB-C21
Laser and Photonics Reviews
https://doi.org/10.1002/lpor.202301327
Sí
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.publisher.none.fl_str_mv Wiley-VCH
publisher.none.fl_str_mv Wiley-VCH
dc.source.none.fl_str_mv reponame:DIGITAL.CSIC. Repositorio Institucional del CSIC
instname:Consejo Superior de Investigaciones Científicas (CSIC)
instname_str Consejo Superior de Investigaciones Científicas (CSIC)
reponame_str DIGITAL.CSIC. Repositorio Institucional del CSIC
collection DIGITAL.CSIC. Repositorio Institucional del CSIC
repository.name.fl_str_mv
repository.mail.fl_str_mv
_version_ 1869422333100294144
score 15,811543

Similar Items