Data for main text figures - In situ engineering hexagonal boron nitride in van der Waals heterostructures with selective SF6 etching

Data includes AFM, Raman, and Transport measurements of graphene heterostructures before and after etching with SF6.

Detalles Bibliográficos
Autores:	Agarwal, Hitesh, Reserbat-Plantey, Antoine, Barcons Ruiz, David, Soundarapandian, Karuppasamy, Li, Geng, Mkhitaryan, Vahagn, Osmond, Johann, Lozano, Helena, Watanabe, Kenji, Taniguchi, Takashi, Stepanov, Petr, Koppens, Frank H. L., Krishna Kumar, Roshan
Tipo de recurso:	conjunto de datos
Fecha de publicación:	2025
País:	España
Institución:	Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:	DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:	oai:digital.csic.es:10261/405948
Acceso en línea:	http://hdl.handle.net/10261/405948
Access Level:	acceso abierto
Palabra clave:	Graphene SF6 etching hBN etching Van der Waals heterostructure 2D material

Descripción
Sumario:	Data includes AFM, Raman, and Transport measurements of graphene heterostructures before and after etching with SF6.