Compositional depth profiling analysis of thin and ultrathin multilayer coatings by radio-frequency glow discharge optical emission spectroscopy

Parte del número especial: EMRS 2005 Symposium K Protective Coatings and Thin Films (31 May-3 June 2005 • Strasbourg, France)

Detalles Bibliográficos
Autores: Escobar-Galindo, Ramón, Forniés, E., Albella Martín, José María
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2006
País:España
Institución:Universidad de Sevilla (US)
Repositorio:idUS. Depósito de Investigación de la Universidad de Sevilla
OAI Identifier:oai:idus.us.es:11441/147592
Acceso en línea:https://hdl.handle.net/11441/147592
https://doi.org/10.1016/j.surfcoat.2005.11.064
Access Level:acceso abierto
Palabra clave:Multilayer
Hard coatings
GDOES
Depth resolution
Interface
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spelling Compositional depth profiling analysis of thin and ultrathin multilayer coatings by radio-frequency glow discharge optical emission spectroscopyEscobar-Galindo, RamónForniés, E.Albella Martín, José MaríaMultilayerHard coatingsGDOESDepth resolutionInterfaceParte del número especial: EMRS 2005 Symposium K Protective Coatings and Thin Films (31 May-3 June 2005 • Strasbourg, France)In most of the industrial applications of multilayer coatings, a detailed knowledge of the interlayer structure and the interfaces is needed. In comparison with standard surface analysis techniques (SIMS, XPS, AES, etc.), depth profiling by radio-frequency glow discharge optical emission spectroscopy (rf-GDOES) provides rapid information, with a high depth resolution, about the multilayer composition. In rf-GDOES analysis, the depth resolution mainly depends on the roughening induced during the sputtering, the resulting crater geometry and sputtering of material re-deposited on the crater wall. In this work, we have isolated the contribution of these effects in the depth resolution of metal and metal nitride multilayer coatings. The importance of these effects has been firstly tested on multilayer stacks consisting of three alternating metal or nitride layers, typically of 500 nm each. The profiles of materials with high sputtering rate become less affected than material with low sputtering rate due to lower mixing of the layers. The contribution of these factors increased during the analysis of thinner multilayer coatings (∼ 100 nm). After reversing the order of the layer elements, completely different profiles were measured, confirming the role of the differences in sputtering rate and crater shape. Finally, in order to evaluate the depth resolution function of the GDOES technique, ultrathin metal chromium and aluminium nitride layers of 5 nm have been buried at different depths in a metal titanium and chromium nitride matrix, respectively, up to a thickness of 2 μm. The markers were properly resolved both near the surface and deeply embedded in the matrix, demonstrating the excellent capabilities of the GDOES technique to detect very thin films in the nanometric range.ScienceDirectFísica Aplicada I2006info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionapplication/pdfapplication/pdfhttps://hdl.handle.net/11441/147592https://doi.org/10.1016/j.surfcoat.2005.11.064reponame:idUS. Depósito de Investigación de la Universidad de Sevillainstname:Universidad de Sevilla (US)InglésSurface and Coatings Technology, 200 (22-23), 6185-6189.https://www.sciencedirect.com/science/article/pii/S0257897205012752info:eu-repo/semantics/openAccessoai:idus.us.es:11441/1475922026-06-17T12:51:07Z
dc.title.none.fl_str_mv Compositional depth profiling analysis of thin and ultrathin multilayer coatings by radio-frequency glow discharge optical emission spectroscopy
title Compositional depth profiling analysis of thin and ultrathin multilayer coatings by radio-frequency glow discharge optical emission spectroscopy
spellingShingle Compositional depth profiling analysis of thin and ultrathin multilayer coatings by radio-frequency glow discharge optical emission spectroscopy
Escobar-Galindo, Ramón
Multilayer
Hard coatings
GDOES
Depth resolution
Interface
title_short Compositional depth profiling analysis of thin and ultrathin multilayer coatings by radio-frequency glow discharge optical emission spectroscopy
title_full Compositional depth profiling analysis of thin and ultrathin multilayer coatings by radio-frequency glow discharge optical emission spectroscopy
title_fullStr Compositional depth profiling analysis of thin and ultrathin multilayer coatings by radio-frequency glow discharge optical emission spectroscopy
title_full_unstemmed Compositional depth profiling analysis of thin and ultrathin multilayer coatings by radio-frequency glow discharge optical emission spectroscopy
title_sort Compositional depth profiling analysis of thin and ultrathin multilayer coatings by radio-frequency glow discharge optical emission spectroscopy
dc.creator.none.fl_str_mv Escobar-Galindo, Ramón
Forniés, E.
Albella Martín, José María
author Escobar-Galindo, Ramón
author_facet Escobar-Galindo, Ramón
Forniés, E.
Albella Martín, José María
author_role author
author2 Forniés, E.
Albella Martín, José María
author2_role author
author
dc.contributor.none.fl_str_mv Física Aplicada I
dc.subject.none.fl_str_mv Multilayer
Hard coatings
GDOES
Depth resolution
Interface
topic Multilayer
Hard coatings
GDOES
Depth resolution
Interface
description Parte del número especial: EMRS 2005 Symposium K Protective Coatings and Thin Films (31 May-3 June 2005 • Strasbourg, France)
publishDate 2006
dc.date.none.fl_str_mv 2006
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv https://hdl.handle.net/11441/147592
https://doi.org/10.1016/j.surfcoat.2005.11.064
url https://hdl.handle.net/11441/147592
https://doi.org/10.1016/j.surfcoat.2005.11.064
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv Surface and Coatings Technology, 200 (22-23), 6185-6189.
https://www.sciencedirect.com/science/article/pii/S0257897205012752
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
application/pdf
dc.publisher.none.fl_str_mv ScienceDirect
publisher.none.fl_str_mv ScienceDirect
dc.source.none.fl_str_mv reponame:idUS. Depósito de Investigación de la Universidad de Sevilla
instname:Universidad de Sevilla (US)
instname_str Universidad de Sevilla (US)
reponame_str idUS. Depósito de Investigación de la Universidad de Sevilla
collection idUS. Depósito de Investigación de la Universidad de Sevilla
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15.198674

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