Supplementary material for the paper "Process design for the manufacturing of soft X-ray gratings in single-crystal diamond by high-energy heavy-ion irradiation"
A novel manufacturing process for optical gratings suitable for use in the UV and soft X-ray regimes in a single-crystal diamond substrate based on highly focused swift heavy-ion irradiation. This type of grating is extensively used in light source facilities such as synchrotrons or free electron la...
| Autores: | , , , , , , , , , , |
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| Tipo de recurso: | conjunto de datos |
| Estado: | Versión publicada |
| Fecha de publicación: | 2022 |
| País: | España |
| Institución: | Consorcio Madroño |
| Repositorio: | e-cienciaDatos, Repositorio de Datos del Consorcio Madroño |
| OAI Identifier: | doi:10.21950/ARZSJ1 |
| Acceso en línea: | https://doi.org/10.21950/ARZSJ1 |
| Access Level: | acceso abierto |
| Palabra clave: | Physics Ion irradiation grating diamond lithography Soft X-ray |
| Sumario: | A novel manufacturing process for optical gratings suitable for use in the UV and soft X-ray regimes in a single-crystal diamond substrate based on highly focused swift heavy-ion irradiation. This type of grating is extensively used in light source facilities such as synchrotrons or free electron lasers, with ever-increasing demands in terms of thermal loads, depending on beamline operational parameters and architecture. The process may be a future alternative to current manufacturing techniques, providing the advantage of being applicable to single-crystal diamond substrates, with their unique properties in terms of heat conductivity and radiation hardness. AFM measured topography of single-crystal diamond sample irradiated with 9 MeV C ions with a dose pattern tuned to obtain a blazed soft X-ray grating. |
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