AFM-based characterization method of capacitive MEMS pressure sensors for cardiological applications

Current CMOS-micro-electro-mechanical systems (MEMS) fabrication technologies permit cardiological implantable devices with sensing capabilities, such as the iStents, to be developed in such a way that MEMS sensors can be monolithically integrated together with a powering/transmitting CMOS circuitry...

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Detalles Bibliográficos
Autores: Miguel Díaz, José Ángel|||/0000-0001-7780-1779, Lechuga Solaegui, Yolanda|||0000-0002-1752-114X, Martínez Solórzano, María del Mar
Tipo de recurso: artículo
Fecha de publicación:2018
País:España
Institución:Universidad de Cantabria (UC)
Repositorio:UCrea Repositorio Abierto de la Universidad de Cantabria
Idioma:inglés
OAI Identifier:oai:repositorio.unican.es:10902/14250
Acceso en línea:http://hdl.handle.net/10902/14250
Access Level:acceso abierto
Palabra clave:Micro-electro-mechanical systems (MEMS) sensors
MEMS modelling
Capacitive pressure sensor
MEMS characterization
Atomic force microscope
Stent
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spelling AFM-based characterization method of capacitive MEMS pressure sensors for cardiological applicationsMiguel Díaz, José Ángel|||/0000-0001-7780-1779Lechuga Solaegui, Yolanda|||0000-0002-1752-114XMartínez Solórzano, María del MarMicro-electro-mechanical systems (MEMS) sensorsMEMS modellingCapacitive pressure sensorMEMS characterizationAtomic force microscopeStentCurrent CMOS-micro-electro-mechanical systems (MEMS) fabrication technologies permit cardiological implantable devices with sensing capabilities, such as the iStents, to be developed in such a way that MEMS sensors can be monolithically integrated together with a powering/transmitting CMOS circuitry. This system on chip fabrication allows the devices to meet the crucial requirements of accuracy, reliability, low-power, and reduced size that any life-sustaining medical application imposes. In this regard, the characterization of stand-alone prototype sensors in an efficient but affordable way to verify sensor performance and to better recognize further areas of improvement is highly advisable. This work proposes a novel characterization method based on an atomic force microscope (AFM) in contact mode that permits to calculate the maximum deflection of the flexible top plate of a capacitive MEMS pressure sensor without coating, under a concentrated load applied to its center. The experimental measurements obtained with this method have allowed to verify the bending behavior of the sensor as predicted by simulation of analytical and finite element (FE) models. This validation process has been carried out on two sensor prototypes with circular and square geometries that were designed using a computer-aided design tool specially-developed for capacitive MEMS pressure sensors.This research was funded by the Spanish Government’s “Ministerio de Economía, Industria y Competitividad” under the joint projects TEC2013-46242-C3-2-P and TEC2013-46242-C3, co-financed with FEDER.MDPIUniversidad de Cantabria20182018-07-06journal articlehttp://purl.org/coar/resource_type/c_6501NAhttp://purl.org/coar/version/c_be7fb7dd8ff6fe43info:eu-repo/semantics/articlehttp://hdl.handle.net/10902/14250Micromachines 2018, 9(7), 342reponame:UCrea Repositorio Abierto de la Universidad de Cantabriainstname:Universidad de Cantabria (UC)Inglésengopen accesshttp://purl.org/coar/access_right/c_abf2Attribution 4.0 Internationalhttp://creativecommons.org/licenses/by/4.0/info:eu-repo/semantics/openAccessoai:repositorio.unican.es:10902/142502026-06-02T12:39:31Z
dc.title.none.fl_str_mv AFM-based characterization method of capacitive MEMS pressure sensors for cardiological applications
title AFM-based characterization method of capacitive MEMS pressure sensors for cardiological applications
spellingShingle AFM-based characterization method of capacitive MEMS pressure sensors for cardiological applications
Miguel Díaz, José Ángel|||/0000-0001-7780-1779
Micro-electro-mechanical systems (MEMS) sensors
MEMS modelling
Capacitive pressure sensor
MEMS characterization
Atomic force microscope
Stent
title_short AFM-based characterization method of capacitive MEMS pressure sensors for cardiological applications
title_full AFM-based characterization method of capacitive MEMS pressure sensors for cardiological applications
title_fullStr AFM-based characterization method of capacitive MEMS pressure sensors for cardiological applications
title_full_unstemmed AFM-based characterization method of capacitive MEMS pressure sensors for cardiological applications
title_sort AFM-based characterization method of capacitive MEMS pressure sensors for cardiological applications
dc.creator.none.fl_str_mv Miguel Díaz, José Ángel|||/0000-0001-7780-1779
Lechuga Solaegui, Yolanda|||0000-0002-1752-114X
Martínez Solórzano, María del Mar
author Miguel Díaz, José Ángel|||/0000-0001-7780-1779
author_facet Miguel Díaz, José Ángel|||/0000-0001-7780-1779
Lechuga Solaegui, Yolanda|||0000-0002-1752-114X
Martínez Solórzano, María del Mar
author_role author
author2 Lechuga Solaegui, Yolanda|||0000-0002-1752-114X
Martínez Solórzano, María del Mar
author2_role author
author
dc.contributor.none.fl_str_mv Universidad de Cantabria
dc.subject.none.fl_str_mv Micro-electro-mechanical systems (MEMS) sensors
MEMS modelling
Capacitive pressure sensor
MEMS characterization
Atomic force microscope
Stent
topic Micro-electro-mechanical systems (MEMS) sensors
MEMS modelling
Capacitive pressure sensor
MEMS characterization
Atomic force microscope
Stent
description Current CMOS-micro-electro-mechanical systems (MEMS) fabrication technologies permit cardiological implantable devices with sensing capabilities, such as the iStents, to be developed in such a way that MEMS sensors can be monolithically integrated together with a powering/transmitting CMOS circuitry. This system on chip fabrication allows the devices to meet the crucial requirements of accuracy, reliability, low-power, and reduced size that any life-sustaining medical application imposes. In this regard, the characterization of stand-alone prototype sensors in an efficient but affordable way to verify sensor performance and to better recognize further areas of improvement is highly advisable. This work proposes a novel characterization method based on an atomic force microscope (AFM) in contact mode that permits to calculate the maximum deflection of the flexible top plate of a capacitive MEMS pressure sensor without coating, under a concentrated load applied to its center. The experimental measurements obtained with this method have allowed to verify the bending behavior of the sensor as predicted by simulation of analytical and finite element (FE) models. This validation process has been carried out on two sensor prototypes with circular and square geometries that were designed using a computer-aided design tool specially-developed for capacitive MEMS pressure sensors.
publishDate 2018
dc.date.none.fl_str_mv 2018
2018-07-06
dc.type.none.fl_str_mv journal article
http://purl.org/coar/resource_type/c_6501
NA
http://purl.org/coar/version/c_be7fb7dd8ff6fe43
dc.type.openaire.fl_str_mv info:eu-repo/semantics/article
format article
dc.identifier.none.fl_str_mv http://hdl.handle.net/10902/14250
url http://hdl.handle.net/10902/14250
dc.language.none.fl_str_mv Inglés
eng
language_invalid_str_mv Inglés
language eng
dc.rights.none.fl_str_mv open access
http://purl.org/coar/access_right/c_abf2
Attribution 4.0 International
http://creativecommons.org/licenses/by/4.0/
dc.rights.openaire.fl_str_mv info:eu-repo/semantics/openAccess
rights_invalid_str_mv open access
http://purl.org/coar/access_right/c_abf2
Attribution 4.0 International
http://creativecommons.org/licenses/by/4.0/
eu_rights_str_mv openAccess
dc.publisher.none.fl_str_mv MDPI
publisher.none.fl_str_mv MDPI
dc.source.none.fl_str_mv Micromachines 2018, 9(7), 342
reponame:UCrea Repositorio Abierto de la Universidad de Cantabria
instname:Universidad de Cantabria (UC)
instname_str Universidad de Cantabria (UC)
reponame_str UCrea Repositorio Abierto de la Universidad de Cantabria
collection UCrea Repositorio Abierto de la Universidad de Cantabria
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15,301603

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