Miguel Díaz, J. Á., Lechuga Solaegui, Y., & Martínez Solórzano, M. d. M. (2018). AFM-based characterization method of capacitive MEMS pressure sensors for cardiological applications.
Citación estilo ChicagoMiguel Díaz, José Ángel|||/0000-0001-7780-1779, Yolanda|||0000-0002-1752-114X Lechuga Solaegui, y María del Mar Martínez Solórzano. AFM-based Characterization Method of Capacitive MEMS Pressure Sensors for Cardiological Applications. 2018.
Cita MLAMiguel Díaz, José Ángel|||/0000-0001-7780-1779, Yolanda|||0000-0002-1752-114X Lechuga Solaegui, y María del Mar Martínez Solórzano. AFM-based Characterization Method of Capacitive MEMS Pressure Sensors for Cardiological Applications. 2018.
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