A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection
This paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of similar to 250 pgcm(-2)Hz(-1). The resonator is embedded in a fully on-chip Pierce oscilla...
| Autores: | , , , , |
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| Formato: | artículo |
| Fecha de publicación: | 2018 |
| País: | España |
| Recursos: | Instituto de Salud Carlos III (ISCIII) |
| Repositorio: | Repisalud |
| Idioma: | inglés |
| OAI Identifier: | oai:repisalud.isciii.es:20.500.12105/22585 |
| Acesso em linha: | https://hdl.handle.net/20.500.12105/22585 |
| Access Level: | acceso abierto |
| Palavra-chave: | MEMS resonators Mass sensors CMOS-MEMS Pierce oscillator |
| Resumo: | This paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of similar to 250 pgcm(-2)Hz(-1). The resonator is embedded in a fully on-chip Pierce oscillator scheme, thus obtaining a quasi-digital output sensor with a short-term frequency stability of 1.2 Hz (0.63 ppm) in air conditions, corresponding to an equivalent mass noise floor as low as 300 pgcm(-2). The monolithic CMOS-MEMS sensor device is fabricated using a commercial 0.35-m 2-poly-4-metal complementary metal-oxide-semiconductor (CMOS) process, thus featuring low cost, batch production, fast turnaround time, and an easy platform for prototyping distributed mass sensors with unprecedented mass resolution for this kind of devices. |
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