Homogeneity and thermal stability of sputtered Al0.7Sc0.3N thin films
| Autores: | , , , , , |
|---|---|
| Tipo de recurso: | artículo |
| Fecha de publicación: | 2023 |
| País: | España |
| Institución: | Universidad Politécnica de Madrid |
| Repositorio: | Archivo Digital UPM |
| OAI Identifier: | oai:oa.upm.es:84864 |
| Acceso en línea: | https://oa.upm.es/84864/ |
| Access Level: | acceso abierto |
| Palabra clave: | AlScN films 30% Sc-doped AlN reactive magnetron sputtering temperature stability FBAR BAW devices |
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Homogeneity and thermal stability of sputtered Al0.7Sc0.3N thin filmsCarmona Cejas, José Manuel|||0000-0003-4307-2349Mirea, Teona|||0000-0003-2324-4895Nieto, JesúsOlivares Roza, Jimena|||0000-0003-4396-4363Felmetsger, Valery|||0000-0003-2940-1273Clement Lorenzo, Marta|||0000-0003-4956-8206AlScN films30% Sc-doped AlNreactive magnetron sputteringtemperature stabilityFBARBAW devices20232023-03-01journal articlehttp://purl.org/coar/resource_type/c_6501info:eu-repo/semantics/articlehttps://oa.upm.es/84864/reponame:Archivo Digital UPMinstname:Universidad Politécnica de MadridInglésenopen accesshttp://purl.org/coar/access_right/c_abf2info:eu-repo/semantics/openAccessoai:oa.upm.es:848642026-06-21T12:45:07Z |
| dc.title.none.fl_str_mv |
Homogeneity and thermal stability of sputtered Al0.7Sc0.3N thin films |
| title |
Homogeneity and thermal stability of sputtered Al0.7Sc0.3N thin films |
| spellingShingle |
Homogeneity and thermal stability of sputtered Al0.7Sc0.3N thin films Carmona Cejas, José Manuel|||0000-0003-4307-2349 AlScN films 30% Sc-doped AlN reactive magnetron sputtering temperature stability FBAR BAW devices |
| title_short |
Homogeneity and thermal stability of sputtered Al0.7Sc0.3N thin films |
| title_full |
Homogeneity and thermal stability of sputtered Al0.7Sc0.3N thin films |
| title_fullStr |
Homogeneity and thermal stability of sputtered Al0.7Sc0.3N thin films |
| title_full_unstemmed |
Homogeneity and thermal stability of sputtered Al0.7Sc0.3N thin films |
| title_sort |
Homogeneity and thermal stability of sputtered Al0.7Sc0.3N thin films |
| dc.creator.none.fl_str_mv |
Carmona Cejas, José Manuel|||0000-0003-4307-2349 Mirea, Teona|||0000-0003-2324-4895 Nieto, Jesús Olivares Roza, Jimena|||0000-0003-4396-4363 Felmetsger, Valery|||0000-0003-2940-1273 Clement Lorenzo, Marta|||0000-0003-4956-8206 |
| author |
Carmona Cejas, José Manuel|||0000-0003-4307-2349 |
| author_facet |
Carmona Cejas, José Manuel|||0000-0003-4307-2349 Mirea, Teona|||0000-0003-2324-4895 Nieto, Jesús Olivares Roza, Jimena|||0000-0003-4396-4363 Felmetsger, Valery|||0000-0003-2940-1273 Clement Lorenzo, Marta|||0000-0003-4956-8206 |
| author_role |
author |
| author2 |
Mirea, Teona|||0000-0003-2324-4895 Nieto, Jesús Olivares Roza, Jimena|||0000-0003-4396-4363 Felmetsger, Valery|||0000-0003-2940-1273 Clement Lorenzo, Marta|||0000-0003-4956-8206 |
| author2_role |
author author author author author |
| dc.subject.none.fl_str_mv |
AlScN films 30% Sc-doped AlN reactive magnetron sputtering temperature stability FBAR BAW devices |
| topic |
AlScN films 30% Sc-doped AlN reactive magnetron sputtering temperature stability FBAR BAW devices |
| publishDate |
2023 |
| dc.date.none.fl_str_mv |
2023 2023-03-01 |
| dc.type.none.fl_str_mv |
journal article http://purl.org/coar/resource_type/c_6501 |
| dc.type.openaire.fl_str_mv |
info:eu-repo/semantics/article |
| format |
article |
| dc.identifier.none.fl_str_mv |
https://oa.upm.es/84864/ |
| url |
https://oa.upm.es/84864/ |
| dc.language.none.fl_str_mv |
Inglés en |
| language_invalid_str_mv |
Inglés en |
| dc.rights.none.fl_str_mv |
open access http://purl.org/coar/access_right/c_abf2 |
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info:eu-repo/semantics/openAccess |
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open access http://purl.org/coar/access_right/c_abf2 |
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openAccess |
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reponame:Archivo Digital UPM instname:Universidad Politécnica de Madrid |
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Universidad Politécnica de Madrid |
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Archivo Digital UPM |
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Archivo Digital UPM |
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1869414718163124224 |
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15,81155 |