Cita APA

Carmona Cejas, J. M., Mirea, T., Nieto, J., Olivares Roza, J., Felmetsger, V., & Clement Lorenzo, M. (2023). Homogeneity and thermal stability of sputtered Al0.7Sc0.3N thin films.

Citación estilo Chicago

Carmona Cejas, José Manuel|||0000-0003-4307-2349, Teona|||0000-0003-2324-4895 Mirea, Jesús Nieto, Jimena|||0000-0003-4396-4363 Olivares Roza, Valery|||0000-0003-2940-1273 Felmetsger, y Marta|||0000-0003-4956-8206 Clement Lorenzo. Homogeneity and Thermal Stability of Sputtered Al0.7Sc0.3N Thin Films. 2023.

Cita MLA

Carmona Cejas, José Manuel|||0000-0003-4307-2349, et al. Homogeneity and Thermal Stability of Sputtered Al0.7Sc0.3N Thin Films. 2023.