Optimization of KOH etching process to obtain textured substrates suitable for heterojunction solar cells fabricated by HWCVD

In this work, we have studied the texturization process of (100) c-Si wafers using a low concentration potassium hydroxide solution in order to obtain good quality textured wafers. The optimization of the etching conditions have led to random but uniform pyramidal structures with good optical proper...

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Detalhes bibliográficos
Autores: Muñoz, D., Carreras Seguí, Paz, Escarré i Palou, Jordi, Ibarz, D., Martín de Nicolás, S., Voz Sánchez, Cristóbal, Asensi López, José Miguel, Bertomeu i Balagueró, Joan
Formato: artículo
Estado:Versión aceptada para publicación
Fecha de publicación:2009
País:España
Recursos:Universidad de Barcelona
Repositorio:Dipòsit Digital de la UB
OAI Identifier:oai:diposit.ub.edu:2445/47284
Acesso em linha:https://hdl.handle.net/2445/47284
Access Level:acceso abierto
Palavra-chave:Deposició química en fase vapor
Cèl·lules solars
Teoria quàntica
Propietats òptiques
Aiguafort
Chemical vapor deposition
Solar cells
Quantum theory
Optical properties
Etching
Descrição
Resumo:In this work, we have studied the texturization process of (100) c-Si wafers using a low concentration potassium hydroxide solution in order to obtain good quality textured wafers. The optimization of the etching conditions have led to random but uniform pyramidal structures with good optical properties. Then, symmetric heterojunctions were deposited by Hot-Wire CVD onto these substrates and the Quasi-Steady-State PhotoConductance technique was used to measure passivation quality. Little degradation in the effective lifetime and implicit open circuit voltage of these devices (< 20 mV) was observed in all cases. It is especially remarkable that for big uniform pyramids, the open-circuit voltage is comparable to the values obtained on flat substrates.