Fabrication of Vertical MEMS Actuator with Hollow Square Electrode for SPR Sensing Applications
In this study, an electrostatically driven vertical MEMS actuator was designed using a hollow square electrode. To attain vertical actuation, a hollow square-shaped electrode was designed on the glass substrate. The silicon proof mass, containing a step, was utilized to realize analogue actuation wi...
| Autores: | , , , |
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| Tipo de recurso: | artículo |
| Estado: | Versión publicada |
| Fecha de publicación: | 2022 |
| País: | España |
| Institución: | Centre Tecnològic de Telecomunicacions de Catalunya (CTTC) |
| Repositorio: | r-CTTC. Repositorio Institucional Producción Científica del Centre Tecnològic de Telecomunicacions de Catalunya (CTTC) |
| OAI Identifier: | oai:cttc.fundanetsuite.com:p7712 |
| Acceso en línea: | https://cttc.fundanetsuite.com/Publicaciones/ProdCientif/PublicacionFrw.aspx?id=7712 |
| Access Level: | acceso abierto |
| Palabra clave: | vertical MEMS actuator hollow square electrode SiOG Otto configuration surface plasmon resonance |
| Sumario: | In this study, an electrostatically driven vertical MEMS actuator was designed using a hollow square electrode. To attain vertical actuation, a hollow square-shaped electrode was designed on the glass substrate. The silicon proof mass, containing a step, was utilized to realize analogue actuation without pull-in. The vertical MEMS actuator was fabricated using the SiOG (Silicon on Glass) process and the total actuator size was 8.3 mm x 8.3 mm. The fabricated proof mass was freestanding due to eight serpentine springs with 30 mu m width. The vertical movement of the MEMS actuator was successfully controlled electrostatically. The measured vertical movement was 5.6 mu m for a voltage of 40 V, applied between the top silicon structure and the hollow square electrode. The results shown here confirm that the proposed MEMS actuator was able to control the vertical displacement using an applied voltage. |
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