Nonlinear actuation model for lateral electrostatically-actuated DC-contact RF MEMS series switches.
In this work, a nonlinear model to predict actuation characteristics in lateral electrostatically-actuated DC-contact MEMS switches is proposed. In this case a parallel-plate approximation cannot be applied. The model is based on the equilibrium equation for an elastic beam. It is demonstrated that...
| Autores: | , , , |
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| Tipo de recurso: | artículo |
| Fecha de publicación: | 2007 |
| País: | España |
| Institución: | Universitat Politècnica de Catalunya (UPC) |
| Repositorio: | UPCommons. Portal del coneixement obert de la UPC |
| Idioma: | inglés |
| OAI Identifier: | oai:upcommons.upc.edu:2117/1779 |
| Acceso en línea: | https://hdl.handle.net/2117/1779 |
| Access Level: | acceso abierto |
| Palabra clave: | Iterative methods (Mathematics) Microelectromechanical systems Electrostatic actuators Finite difference methods Iterative methods Microswitches Relaxation theory Nonlinear actuation model Electrostatically-actuated DC-contact RF MEMS RF MEMS series switches Equilibrium equation Elastic beam Finite-difference discretization Gauss-Seidel relaxation iteration scheme Mètodes iteratius (Matemàtica) Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Radiocomunicació i exploració electromagnètica::Circuits de microones, radiofreqüència i ones mil·limètriques |
| Sumario: | In this work, a nonlinear model to predict actuation characteristics in lateral electrostatically-actuated DC-contact MEMS switches is proposed. In this case a parallel-plate approximation cannot be applied. The model is based on the equilibrium equation for an elastic beam. It is demonstrated that the contribution of fringing fields is essential. The model relies on finite-difference discretization of the structures, applying boundary conditions and is solved with a Gauss- Seidel relaxation iteration scheme. Its usefulness is demonstrated in a series MEMS switch with lateral interdigital electrostatic actuation. |
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