Air-Gap Interrogation of Surface Plasmon Resonance in Otto Configuration
In this study, a micromachined chip in Otto configuration with multiple air-gaps (1.86 mu m, 2.42 mu m, 3.01 mu m, 3.43 mu m) was fabricated, and the resonance characteristics for each air-gap was measured with a 980 nm laser source. To verify the variability of the reflectance characteristics of th...
| Autores: | , , , |
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| Formato: | artículo |
| Estado: | Versión publicada |
| Fecha de publicación: | 2021 |
| País: | España |
| Recursos: | Centre Tecnològic de Telecomunicacions de Catalunya (CTTC) |
| Repositorio: | r-CTTC. Repositorio Institucional Producción Científica del Centre Tecnològic de Telecomunicacions de Catalunya (CTTC) |
| OAI Identifier: | oai:cttc.fundanetsuite.com:p4099 |
| Acesso em linha: | https://cttc.fundanetsuite.com/Publicaciones/ProdCientif/PublicacionFrw.aspx?id=4099 |
| Access Level: | acceso abierto |
| Palavra-chave: | surface plasmon resonance Kretschmann configuration Otto configuration piezoactuator MEMS actuator FEM simulation |
| Resumo: | In this study, a micromachined chip in Otto configuration with multiple air-gaps (1.86 mu m, 2.42 mu m, 3.01 mu m, 3.43 mu m) was fabricated, and the resonance characteristics for each air-gap was measured with a 980 nm laser source. To verify the variability of the reflectance characteristics of the Otto configuration and its applicability to multiple gas detection, the air-gap between the prism and metal film was adjusted by using a commercial piezoactuator. We experimentally verified that the SPR characteristics of the Otto chip configuration have a dependence on the air-gap distance and wavelength of the incident light. When a light source having a wavelength of 977 nm is used, the minimum reflectance becomes 0.22 when the displacement of the piezoactuator is about 9.3 mu m. |
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