Modelling the electrostatic actuation of MEMS: state of the art 2005.
Most of MEMS devices are actuated using electrostatic forces. Parallel or lateral plate actuators are the types commonly used. Nevertheless, electrostatic actuation has some limitations due to its non-linear nature. This work presents a methodic overview of the existing techniques applied to the Mic...
| Authors: | , , |
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| Format: | report |
| Publication Date: | 2005 |
| Country: | España |
| Institution: | Universitat Politècnica de Catalunya (UPC) |
| Repository: | UPCommons. Portal del coneixement obert de la UPC |
| Language: | English |
| OAI Identifier: | oai:upcommons.upc.edu:2117/119 |
| Online Access: | https://hdl.handle.net/2117/119 |
| Access Level: | Open access |
| Keyword: | Àrees temàtiques de la UPC::Informàtica::Automàtica i control |
| Summary: | Most of MEMS devices are actuated using electrostatic forces. Parallel or lateral plate actuators are the types commonly used. Nevertheless, electrostatic actuation has some limitations due to its non-linear nature. This work presents a methodic overview of the existing techniques applied to the Micro-Electro-Mechanical Systems (MEMS) electrostatic actuation modeling and their implications to the dynamic behavior of the electromechanical system. |
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