Energy-efficient full-range oscillation analysis of parallel-plate electrostatically actuated MEMS resonators
This is the peer reviewed version of the following article: “Fargas Marques, A., Costa Castelló, R. (2017) Energy-efficient full-range oscillation analysis of parallel-plate electrostatically actuated MEMS resonators, 1-13.” which has been published in final form at [doi: 10.1007/s11071-017-3633-8]....
| Autores: | , |
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| Tipo de documento: | artigo |
| Data de publicação: | 2017 |
| País: | España |
| Recursos: | Universitat Politècnica de Catalunya (UPC) |
| Repositório: | UPCommons. Portal del coneixement obert de la UPC |
| Idioma: | inglês |
| OAI Identifier: | oai:upcommons.upc.edu:2117/107584 |
| Acesso em linha: | https://hdl.handle.net/2117/107584 https://dx.doi.org/10.1007/s11071-017-3633-8 |
| Access Level: | Acceso aberto |
| Palavra-chave: | Microelectromechanical systems Energy consumption Microsystems Parallel-plate electrostatic actuation Harmonic Balance Energy efficiency Sistemes microelectromecànics Energia -- Estalvi Àrees temàtiques de la UPC::Informàtica::Seguretat informàtica |
| Resumo: | This is the peer reviewed version of the following article: “Fargas Marques, A., Costa Castelló, R. (2017) Energy-efficient full-range oscillation analysis of parallel-plate electrostatically actuated MEMS resonators, 1-13.” which has been published in final form at [doi: 10.1007/s11071-017-3633-8]. This article may be used for non-commercial purposes in accordance with Wiley Terms and Conditions for Self-Archiving." |
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