Analysis of spurious peaks at series resonance in solidly mounted resonators by combined BVD-Mason modelling

Solidly Mounted Resonators (SMRs) for high frequency RF filters and sensing applications often display spurious resonances that distort their frequency response. In this work, we try to identify the origin of spurious resonances accompanying the main series resonances in AlN-based SMRs with the help...

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Detalles Bibliográficos
Autores: Lugo Hernández, Eduardo|||0000-0001-9666-1329, Mirea, Teona, Carmona Cejas, Jose Manuel, Clement Lorenzo, Marta, Olivares Roza, Jimena, Collado Gómez, Juan Carlos|||0000-0002-8869-2739, Mateu Mateu, Jordi|||0000-0001-9833-9966
Tipo de recurso: artículo
Fecha de publicación:2023
País:España
Institución:Universitat Politècnica de Catalunya (UPC)
Repositorio:UPCommons. Portal del coneixement obert de la UPC
Idioma:inglés
OAI Identifier:oai:upcommons.upc.edu:2117/386462
Acceso en línea:https://hdl.handle.net/2117/386462
https://dx.doi.org/10.1016/j.ultras.2023.106958
Access Level:acceso abierto
Palabra clave:Frequency response (Electrical engineering)
Resonators
FBAR
Mason model
Modified Butterworth
Ohmic losses
SMR
Spurious resonance
Resposta freqüencial (Enginyeria elèctrica)
Ressonadors
Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Processament del senyal
Descripción
Sumario:Solidly Mounted Resonators (SMRs) for high frequency RF filters and sensing applications often display spurious resonances that distort their frequency response. In this work, we try to identify the origin of spurious resonances accompanying the main series resonances in AlN-based SMRs with the help of modified Butterworth Van Dyke (BVD) and Mason’s models. By manufacturing SMRs of different sizes and shapes and studying the influence of the position of the electrical probing spot, we have demonstrated both theoretically and experimentally that devices with larger areas are more likely to display these additional peaks. Our updated models accurately simulate the frequency response of the SMRs, revealing that spurious peaks are mostly related to the resistance of the electrodes. Our study clarifies the origin of the spurious resonances and offers solutions for both, the optimal design and measurement method of SMRs.