Characterization of dynamics and power handling of RF MEMS using vector measurement techniques

This paper proposes a new method to measure dynamics and power handling of RF microelectromechanical systems (MEMS) devices based on a mobile membrane. The method uses in-phase/quadrature demodulation of an RF signal proportional to the reflection coefficient of the measured device, which contains i...

Descripción completa

Detalles Bibliográficos
Autores: Girbau Sala, David, Lázaro Guillén, Antoni, Pradell i Cara, Lluís|||0000-0003-4026-226X
Tipo de recurso: artículo
Fecha de publicación:2004
País:España
Institución:Universitat Politècnica de Catalunya (UPC)
Repositorio:UPCommons. Portal del coneixement obert de la UPC
Idioma:inglés
OAI Identifier:oai:upcommons.upc.edu:2117/1076
Acceso en línea:https://hdl.handle.net/2117/1076
Access Level:acceso abierto
Palabra clave:Capacitors
Demodulation (Electronics)
Microelectromechanical systems
Radio frequency
Q-factor
capacitors
demodulation
microswitches
Condensadors
Modulació (Electrònica)
Sistemes microelectromecànics
Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Radiocomunicació i exploració electromagnètica::Circuits de microones, radiofreqüència i ones mil·limètriques
id ES_69f75b6b68c1a899dbf86ccbba7ee3ca
oai_identifier_str oai:upcommons.upc.edu:2117/1076
network_acronym_str ES
network_name_str España
repository_id_str
spelling Characterization of dynamics and power handling of RF MEMS using vector measurement techniquesGirbau Sala, DavidLázaro Guillén, AntoniPradell i Cara, Lluís|||0000-0003-4026-226XCapacitorsDemodulation (Electronics)Microelectromechanical systemsRadio frequencyQ-factorcapacitorsdemodulationmicroswitchesCondensadorsModulació (Electrònica)Sistemes microelectromecànicsÀrees temàtiques de la UPC::Enginyeria de la telecomunicació::Radiocomunicació i exploració electromagnètica::Circuits de microones, radiofreqüència i ones mil·limètriquesThis paper proposes a new method to measure dynamics and power handling of RF microelectromechanical systems (MEMS) devices based on a mobile membrane. The method uses in-phase/quadrature demodulation of an RF signal proportional to the reflection coefficient of the measured device, which contains information of its mechanical properties, such as actuation and release times and instantaneous position of the mobile membrane. Both one-port (capacitors) and two-port devices (switches and extended tuning-range capacitors) can be measured. Its main advantage is the capability of obtaining information from both magnitude and phase variations of the device reflection coefficient to characterize its dynamics and power handling. It is shown that detecting phase is advantageous in high quality factor capacitors, where the magnitude of the reflection coefficient is nearly constant for any position of the mobile membrane. Open-short-load calibration of the system is provided in order to obtain absolute measurements, which are necessary for power-handling characterization. The performances of the proposed method are demonstrated by comparison to systems based on detection of the magnitude of the reflection coefficient. A MEMS capacitor is characterized in terms of dynamics-actuation and release times, and mechanical resonance frequency and in terms of power handling-membrane instantaneous position and phase and tuning range variation.Peer ReviewedIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC20042004-11-3020072007-06-11journal articlehttp://purl.org/coar/resource_type/c_6501NAhttp://purl.org/coar/version/c_be7fb7dd8ff6fe43info:eu-repo/semantics/articleapplication/pdfhttps://hdl.handle.net/2117/1076reponame:UPCommons. Portal del coneixement obert de la UPCinstname:Universitat Politècnica de Catalunya (UPC)Inglésengopen accesshttp://purl.org/coar/access_right/c_abf2info:eu-repo/semantics/openAccessoai:upcommons.upc.edu:2117/10762026-05-27T15:37:01Z
dc.title.none.fl_str_mv Characterization of dynamics and power handling of RF MEMS using vector measurement techniques
title Characterization of dynamics and power handling of RF MEMS using vector measurement techniques
spellingShingle Characterization of dynamics and power handling of RF MEMS using vector measurement techniques
Girbau Sala, David
Capacitors
Demodulation (Electronics)
Microelectromechanical systems
Radio frequency
Q-factor
capacitors
demodulation
microswitches
Condensadors
Modulació (Electrònica)
Sistemes microelectromecànics
Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Radiocomunicació i exploració electromagnètica::Circuits de microones, radiofreqüència i ones mil·limètriques
title_short Characterization of dynamics and power handling of RF MEMS using vector measurement techniques
title_full Characterization of dynamics and power handling of RF MEMS using vector measurement techniques
title_fullStr Characterization of dynamics and power handling of RF MEMS using vector measurement techniques
title_full_unstemmed Characterization of dynamics and power handling of RF MEMS using vector measurement techniques
title_sort Characterization of dynamics and power handling of RF MEMS using vector measurement techniques
dc.creator.none.fl_str_mv Girbau Sala, David
Lázaro Guillén, Antoni
Pradell i Cara, Lluís|||0000-0003-4026-226X
author Girbau Sala, David
author_facet Girbau Sala, David
Lázaro Guillén, Antoni
Pradell i Cara, Lluís|||0000-0003-4026-226X
author_role author
author2 Lázaro Guillén, Antoni
Pradell i Cara, Lluís|||0000-0003-4026-226X
author2_role author
author
dc.subject.none.fl_str_mv Capacitors
Demodulation (Electronics)
Microelectromechanical systems
Radio frequency
Q-factor
capacitors
demodulation
microswitches
Condensadors
Modulació (Electrònica)
Sistemes microelectromecànics
Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Radiocomunicació i exploració electromagnètica::Circuits de microones, radiofreqüència i ones mil·limètriques
topic Capacitors
Demodulation (Electronics)
Microelectromechanical systems
Radio frequency
Q-factor
capacitors
demodulation
microswitches
Condensadors
Modulació (Electrònica)
Sistemes microelectromecànics
Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Radiocomunicació i exploració electromagnètica::Circuits de microones, radiofreqüència i ones mil·limètriques
description This paper proposes a new method to measure dynamics and power handling of RF microelectromechanical systems (MEMS) devices based on a mobile membrane. The method uses in-phase/quadrature demodulation of an RF signal proportional to the reflection coefficient of the measured device, which contains information of its mechanical properties, such as actuation and release times and instantaneous position of the mobile membrane. Both one-port (capacitors) and two-port devices (switches and extended tuning-range capacitors) can be measured. Its main advantage is the capability of obtaining information from both magnitude and phase variations of the device reflection coefficient to characterize its dynamics and power handling. It is shown that detecting phase is advantageous in high quality factor capacitors, where the magnitude of the reflection coefficient is nearly constant for any position of the mobile membrane. Open-short-load calibration of the system is provided in order to obtain absolute measurements, which are necessary for power-handling characterization. The performances of the proposed method are demonstrated by comparison to systems based on detection of the magnitude of the reflection coefficient. A MEMS capacitor is characterized in terms of dynamics-actuation and release times, and mechanical resonance frequency and in terms of power handling-membrane instantaneous position and phase and tuning range variation.
publishDate 2004
dc.date.none.fl_str_mv 2004
2004-11-30
2007
2007-06-11
dc.type.none.fl_str_mv journal article
http://purl.org/coar/resource_type/c_6501
NA
http://purl.org/coar/version/c_be7fb7dd8ff6fe43
dc.type.openaire.fl_str_mv info:eu-repo/semantics/article
format article
dc.identifier.none.fl_str_mv https://hdl.handle.net/2117/1076
url https://hdl.handle.net/2117/1076
dc.language.none.fl_str_mv Inglés
eng
language_invalid_str_mv Inglés
language eng
dc.rights.none.fl_str_mv open access
http://purl.org/coar/access_right/c_abf2
dc.rights.openaire.fl_str_mv info:eu-repo/semantics/openAccess
rights_invalid_str_mv open access
http://purl.org/coar/access_right/c_abf2
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
publisher.none.fl_str_mv IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
dc.source.none.fl_str_mv reponame:UPCommons. Portal del coneixement obert de la UPC
instname:Universitat Politècnica de Catalunya (UPC)
instname_str Universitat Politècnica de Catalunya (UPC)
reponame_str UPCommons. Portal del coneixement obert de la UPC
collection UPCommons. Portal del coneixement obert de la UPC
repository.name.fl_str_mv
repository.mail.fl_str_mv
_version_ 1869410067502071809
score 15,300724

Similares en LA Referencia