Local Tuning of the Epsilon-Near-Zero Condition in Hybrid Silicon Waveguides Using Reactive Laser Annealing

[EN] The ability for locally tuning devices in photonic integrated circuits could be an essential function for a wide range of applications requiring reconfigurable photonics. This work demonstrates the application of postgrowth reactive laser annealing to selectively tune the optical properties of...

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Autores: Navarro-Arenas, Juan, Howe, Thomas M., Koutsogeorgis, Demosthenes C., Hillier, James A., Kalfagiannis, Nikolaos, Parra Gomez, Jorge|||0000-0003-4610-3411, Sanchis Kilders, Pablo|||0000-0003-2984-4218
Tipo de recurso: artículo
Fecha de publicación:2025
País:España
Institución:Universitat Politècnica de València (UPV)
Repositorio:RiuNet. Repositorio Institucional de la Universitat Politécnica de Valéncia
Idioma:inglés
OAI Identifier:oai:riunet.upv.es:10251/220099
Acceso en línea:https://riunet.upv.es/handle/10251/220099
Access Level:acceso abierto
Palabra clave:Epsilon-near-zero
Hybrid silicon waveguide
Indium tin oxide
Laser annealing
Silicon photonics
Transparent conducting oxides
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spelling Local Tuning of the Epsilon-Near-Zero Condition in Hybrid Silicon Waveguides Using Reactive Laser AnnealingNavarro-Arenas, JuanHowe, Thomas M.Koutsogeorgis, Demosthenes C.Hillier, James A.Kalfagiannis, NikolaosParra Gomez, Jorge|||0000-0003-4610-3411Sanchis Kilders, Pablo|||0000-0003-2984-4218Epsilon-near-zeroHybrid silicon waveguideIndium tin oxideLaser annealingSilicon photonicsTransparent conducting oxides[EN] The ability for locally tuning devices in photonic integrated circuits could be an essential function for a wide range of applications requiring reconfigurable photonics. This work demonstrates the application of postgrowth reactive laser annealing to selectively tune the optical properties of tin-doped indium oxide (ITO) patches integrated in silicon waveguides. ITO stands out due to its distinctive ability to operate in the epsilon-near-zero (ENZ) regime at near-infrared wavelengths. The precise local tuning of the ENZ wavelength in ITO/Si hybrid waveguides by controlling the laser annealing fluence is demonstrated. This technique uniquely allows for the customization of optical constants at critical telecom wavelengths. The findings present a powerful and adaptable method to exploit the exceptional qualities of ITO and, by extension, other transparent conducting oxides, paving the way for the functional diversification of hybrid photonic devices on a singular-silicon chip.P.S. acknowledges funding from Agencia Estatal de Investigación (PID2022-137787OB-I00 funded by MCIN/AEI/10.13039/501100011033 and by ERDF A way of making Europe ) and Generalitat Valenciana (PROMETEO Program (CIPROM/2022/14), Advanced Materials programme supported by MCIN with funding from European Union NextGenerationEU, and by Generalitat Valenciana (PRTR-C17.I1). J.N-A. acknowledges funding from University of Valencia/Ministry of Universities (Government of Spain), modality Margarita Salas , funded by the European Union, Next-Generation EU (MS21-037). T.M.H. acknowledges partial funding support from the Department of Physics & Mathematics at Nottingham Trent University through the final year project competition scheme. J.P. acknowledges funding from Universitat Politècncia de València (PAID-10-23).Wiley-VCHDepartamento de ComunicacionesInstituto Universitario de Tecnología NanofotónicaEscuela Técnica Superior de Ingeniería Aeroespacial y Diseño IndustrialEscuela Técnica Superior de Ingeniería de TelecomunicaciónGENERALITAT VALENCIANAAGENCIA ESTATAL DE INVESTIGACIONEuropean Regional Development FundUNIVERSIDAD POLITECNICA DE VALENCIARepositorio Institucional de la Universitat Politècnica de València Riunet20252025-01-28journal articlehttp://purl.org/coar/resource_type/c_6501VoRhttp://purl.org/coar/version/c_970fb48d4fbd8a85info:eu-repo/semantics/articleapplication/pdfhttps://riunet.upv.es/handle/10251/220099reponame:RiuNet. Repositorio Institucional de la Universitat Politécnica de Valénciainstname:Universitat Politècnica de València (UPV)InglésengAgencia Estatal de Investigación http://dx.doi.org/10.13039/501100011033 Plan Estatal de Investigación Científica y Técnica y de Innovación 2021-2023 PID2022-137787OB-I00 HARDWARE FOTONICO PARA INTELIGENCIA ARTIFICIALGeneralitat Valenciana https://doi.org/10.13039/501100003359 CIPROM%2F2022%2F14 NANOPHOTONIC INTEGRATED DEVICES FOR EMERGING HIGH-IMPACT APPLICATIONSUniversitat Politècnica de València https://doi.org/10.13039/501100004233 PAID-10-23 Desarrollo de nuevos componentes fotónicos integrando ferroeléctricos y materiales de cambio de faseGeneralitat Valenciana https://doi.org/10.13039/501100003359 MFA%2F2022%2F025 Actividades en grafeno, materiales 2D y materiales con funcionalidades inteligentes para el desarrollo tecnológicoopen accesshttp://purl.org/coar/access_right/c_abf2Reconocimiento (by)http://creativecommons.org/licenses/by/4.0/info:eu-repo/semantics/openAccessoai:riunet.upv.es:10251/2200992026-06-13T07:49:27Z
dc.title.none.fl_str_mv Local Tuning of the Epsilon-Near-Zero Condition in Hybrid Silicon Waveguides Using Reactive Laser Annealing
title Local Tuning of the Epsilon-Near-Zero Condition in Hybrid Silicon Waveguides Using Reactive Laser Annealing
spellingShingle Local Tuning of the Epsilon-Near-Zero Condition in Hybrid Silicon Waveguides Using Reactive Laser Annealing
Navarro-Arenas, Juan
Epsilon-near-zero
Hybrid silicon waveguide
Indium tin oxide
Laser annealing
Silicon photonics
Transparent conducting oxides
title_short Local Tuning of the Epsilon-Near-Zero Condition in Hybrid Silicon Waveguides Using Reactive Laser Annealing
title_full Local Tuning of the Epsilon-Near-Zero Condition in Hybrid Silicon Waveguides Using Reactive Laser Annealing
title_fullStr Local Tuning of the Epsilon-Near-Zero Condition in Hybrid Silicon Waveguides Using Reactive Laser Annealing
title_full_unstemmed Local Tuning of the Epsilon-Near-Zero Condition in Hybrid Silicon Waveguides Using Reactive Laser Annealing
title_sort Local Tuning of the Epsilon-Near-Zero Condition in Hybrid Silicon Waveguides Using Reactive Laser Annealing
dc.creator.none.fl_str_mv Navarro-Arenas, Juan
Howe, Thomas M.
Koutsogeorgis, Demosthenes C.
Hillier, James A.
Kalfagiannis, Nikolaos
Parra Gomez, Jorge|||0000-0003-4610-3411
Sanchis Kilders, Pablo|||0000-0003-2984-4218
author Navarro-Arenas, Juan
author_facet Navarro-Arenas, Juan
Howe, Thomas M.
Koutsogeorgis, Demosthenes C.
Hillier, James A.
Kalfagiannis, Nikolaos
Parra Gomez, Jorge|||0000-0003-4610-3411
Sanchis Kilders, Pablo|||0000-0003-2984-4218
author_role author
author2 Howe, Thomas M.
Koutsogeorgis, Demosthenes C.
Hillier, James A.
Kalfagiannis, Nikolaos
Parra Gomez, Jorge|||0000-0003-4610-3411
Sanchis Kilders, Pablo|||0000-0003-2984-4218
author2_role author
author
author
author
author
author
dc.contributor.none.fl_str_mv Departamento de Comunicaciones
Instituto Universitario de Tecnología Nanofotónica
Escuela Técnica Superior de Ingeniería Aeroespacial y Diseño Industrial
Escuela Técnica Superior de Ingeniería de Telecomunicación
GENERALITAT VALENCIANA
AGENCIA ESTATAL DE INVESTIGACION
European Regional Development Fund
UNIVERSIDAD POLITECNICA DE VALENCIA
Repositorio Institucional de la Universitat Politècnica de València Riunet
dc.subject.none.fl_str_mv Epsilon-near-zero
Hybrid silicon waveguide
Indium tin oxide
Laser annealing
Silicon photonics
Transparent conducting oxides
topic Epsilon-near-zero
Hybrid silicon waveguide
Indium tin oxide
Laser annealing
Silicon photonics
Transparent conducting oxides
description [EN] The ability for locally tuning devices in photonic integrated circuits could be an essential function for a wide range of applications requiring reconfigurable photonics. This work demonstrates the application of postgrowth reactive laser annealing to selectively tune the optical properties of tin-doped indium oxide (ITO) patches integrated in silicon waveguides. ITO stands out due to its distinctive ability to operate in the epsilon-near-zero (ENZ) regime at near-infrared wavelengths. The precise local tuning of the ENZ wavelength in ITO/Si hybrid waveguides by controlling the laser annealing fluence is demonstrated. This technique uniquely allows for the customization of optical constants at critical telecom wavelengths. The findings present a powerful and adaptable method to exploit the exceptional qualities of ITO and, by extension, other transparent conducting oxides, paving the way for the functional diversification of hybrid photonic devices on a singular-silicon chip.
publishDate 2025
dc.date.none.fl_str_mv 2025
2025-01-28
dc.type.none.fl_str_mv journal article
http://purl.org/coar/resource_type/c_6501
VoR
http://purl.org/coar/version/c_970fb48d4fbd8a85
dc.type.openaire.fl_str_mv info:eu-repo/semantics/article
format article
dc.identifier.none.fl_str_mv https://riunet.upv.es/handle/10251/220099
url https://riunet.upv.es/handle/10251/220099
dc.language.none.fl_str_mv Inglés
eng
language_invalid_str_mv Inglés
language eng
dc.relation.none.fl_str_mv Agencia Estatal de Investigación http://dx.doi.org/10.13039/501100011033 Plan Estatal de Investigación Científica y Técnica y de Innovación 2021-2023 PID2022-137787OB-I00 HARDWARE FOTONICO PARA INTELIGENCIA ARTIFICIAL
Generalitat Valenciana https://doi.org/10.13039/501100003359 CIPROM%2F2022%2F14 NANOPHOTONIC INTEGRATED DEVICES FOR EMERGING HIGH-IMPACT APPLICATIONS
Universitat Politècnica de València https://doi.org/10.13039/501100004233 PAID-10-23 Desarrollo de nuevos componentes fotónicos integrando ferroeléctricos y materiales de cambio de fase
Generalitat Valenciana https://doi.org/10.13039/501100003359 MFA%2F2022%2F025 Actividades en grafeno, materiales 2D y materiales con funcionalidades inteligentes para el desarrollo tecnológico
dc.rights.none.fl_str_mv open access
http://purl.org/coar/access_right/c_abf2
Reconocimiento (by)
http://creativecommons.org/licenses/by/4.0/
dc.rights.openaire.fl_str_mv info:eu-repo/semantics/openAccess
rights_invalid_str_mv open access
http://purl.org/coar/access_right/c_abf2
Reconocimiento (by)
http://creativecommons.org/licenses/by/4.0/
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Wiley-VCH
publisher.none.fl_str_mv Wiley-VCH
dc.source.none.fl_str_mv reponame:RiuNet. Repositorio Institucional de la Universitat Politécnica de Valéncia
instname:Universitat Politècnica de València (UPV)
instname_str Universitat Politècnica de València (UPV)
reponame_str RiuNet. Repositorio Institucional de la Universitat Politécnica de Valéncia
collection RiuNet. Repositorio Institucional de la Universitat Politécnica de Valéncia
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15,812429

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