Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors

© The Electrochemical Society, Inc. 2000. All rights reserved. Except as provided under U.S. copyright law, this work may not be reproduced, resold, distributed, or modified without the express permission of The Electrochemical Society (ECS). The archival version of this work was published in Journa...

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Detalles Bibliográficos
Autores: Barbadillo, L., Hernández Muñoz, María Jesús, Cervera Goy, Manuel, Piqueras, Juan
Tipo de recurso: artículo
Fecha de publicación:2000
País:España
Institución:Universidad Autónoma de Madrid
Repositorio:Biblos-e Archivo. Repositorio Institucional de la UAM
Idioma:inglés
OAI Identifier:oai:repositorio.uam.es:10486/13950
Acceso en línea:http://hdl.handle.net/10486/13950
https://dx.doi.org/10.1149/1.1393987
Access Level:acceso abierto
Palabra clave:Física
Electrónica
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spelling Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursorsBarbadillo, L.Hernández Muñoz, María JesúsCervera Goy, ManuelPiqueras, JuanFísicaElectrónica© The Electrochemical Society, Inc. 2000. All rights reserved. Except as provided under U.S. copyright law, this work may not be reproduced, resold, distributed, or modified without the express permission of The Electrochemical Society (ECS). The archival version of this work was published in Journal of The Electrochemical Society. Barbadillo, L., Hernández, M. J., Cervera, M. and J. Piqueras. Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors. Journal of The Electrochemical Society 147.10 (2000): 3864-3867Electrochemical SocietyFacultad de Ciencias20002000-01-01research articlehttp://purl.org/coar/resource_type/c_2df8fbb1NAhttp://purl.org/coar/version/c_be7fb7dd8ff6fe43info:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/10486/13950https://dx.doi.org/10.1149/1.1393987reponame:Biblos-e Archivo. Repositorio Institucional de la UAMinstname:Universidad Autónoma de MadridInglésengopen accesshttp://purl.org/coar/access_right/c_abf2info:eu-repo/semantics/openAccessoai:repositorio.uam.es:10486/139502026-06-23T12:46:27Z
dc.title.none.fl_str_mv Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors
title Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors
spellingShingle Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors
Barbadillo, L.
Física
Electrónica
title_short Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors
title_full Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors
title_fullStr Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors
title_full_unstemmed Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors
title_sort Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors
dc.creator.none.fl_str_mv Barbadillo, L.
Hernández Muñoz, María Jesús
Cervera Goy, Manuel
Piqueras, Juan
author Barbadillo, L.
author_facet Barbadillo, L.
Hernández Muñoz, María Jesús
Cervera Goy, Manuel
Piqueras, Juan
author_role author
author2 Hernández Muñoz, María Jesús
Cervera Goy, Manuel
Piqueras, Juan
author2_role author
author
author
dc.contributor.none.fl_str_mv Facultad de Ciencias
dc.subject.none.fl_str_mv Física
Electrónica
topic Física
Electrónica
description © The Electrochemical Society, Inc. 2000. All rights reserved. Except as provided under U.S. copyright law, this work may not be reproduced, resold, distributed, or modified without the express permission of The Electrochemical Society (ECS). The archival version of this work was published in Journal of The Electrochemical Society. Barbadillo, L., Hernández, M. J., Cervera, M. and J. Piqueras. Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors. Journal of The Electrochemical Society 147.10 (2000): 3864-3867
publishDate 2000
dc.date.none.fl_str_mv 2000
2000-01-01
dc.type.none.fl_str_mv research article
http://purl.org/coar/resource_type/c_2df8fbb1
NA
http://purl.org/coar/version/c_be7fb7dd8ff6fe43
dc.type.openaire.fl_str_mv info:eu-repo/semantics/article
format article
dc.identifier.none.fl_str_mv http://hdl.handle.net/10486/13950
https://dx.doi.org/10.1149/1.1393987
url http://hdl.handle.net/10486/13950
https://dx.doi.org/10.1149/1.1393987
dc.language.none.fl_str_mv Inglés
eng
language_invalid_str_mv Inglés
language eng
dc.rights.none.fl_str_mv open access
http://purl.org/coar/access_right/c_abf2
dc.rights.openaire.fl_str_mv info:eu-repo/semantics/openAccess
rights_invalid_str_mv open access
http://purl.org/coar/access_right/c_abf2
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Electrochemical Society
publisher.none.fl_str_mv Electrochemical Society
dc.source.none.fl_str_mv reponame:Biblos-e Archivo. Repositorio Institucional de la UAM
instname:Universidad Autónoma de Madrid
instname_str Universidad Autónoma de Madrid
reponame_str Biblos-e Archivo. Repositorio Institucional de la UAM
collection Biblos-e Archivo. Repositorio Institucional de la UAM
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repository.mail.fl_str_mv
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