Recovery of the MOSFET and circuit functionality after the dielectric breakdown of ultra-thin high-k gate stacks

The reversibility of the gate dielectric breakdown in ultra-thin high-k dielectric stacks is reported and analyzed. The electrical performance of MOSFETs after the dielectric recovery is modeled and introduced in a circuit simulator. The simulation of several digital circuits shows that their functi...

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Detalles Bibliográficos
Autores: Crespo Yepes, Albert|||0000-0003-4618-651X, Martin Martinez, Javier|||0000-0001-5938-5898, Rothschild, A., Rodríguez Martínez, Rosana|||0000-0002-4565-6703, Nafria, Montserrat|||0000-0002-9549-2890, Aymerich Humet, Xavier|||0000-0002-5874-6257
Tipo de recurso: artículo
Fecha de publicación:2010
País:España
Institución:Universitat Autònoma de Barcelona
Repositorio:Dipòsit Digital de Documents de la UAB
Idioma:inglés
OAI Identifier:oai:ddd.uab.cat:138451
Acceso en línea:https://ddd.uab.cat/record/138451
https://dx.doi.org/urn:doi:10.1109/LED.2010.2045732
Access Level:acceso abierto
Palabra clave:Dielectric breakdown
Dielectric breakdown reversibility
High-k
Resistive switching
CMOS circuits
Descripción
Sumario:The reversibility of the gate dielectric breakdown in ultra-thin high-k dielectric stacks is reported and analyzed. The electrical performance of MOSFETs after the dielectric recovery is modeled and introduced in a circuit simulator. The simulation of several digital circuits shows that their functionality can be restored after the BD recovery.