Positron annihilation analysis of nanopores and growth mechanism of oblique angle evaporated TiO2 and SiO2 thin films and multilayers

The nano-porosity embedded into the tilted and separated nanocolumns characteristic of the microstructure of evaporated thin films at oblique angles has been critically assessed by various variants of the positron annihilation spectroscopy. This technique represents a powerful tool for the analysis...

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Authors: García Valenzuela, Aurelio, Butterling, Maik, Liedke, Maciej Oskar, Hirschmann, Eric, Trinh, Thu Trang, Attallah, Ahmed G., Wagner, Andreas, Álvarez Molina, Rafael, Gil Rostra, Jorge, Rico, Víctor, Palmero Acebedo, Alberto, González Elipe, Agustín Rodríguez
Format: article
Status:Versión enviada para evaluación y publicación
Publication Date:2020
Country:España
Institution:Universidad de Sevilla (US)
Repository:idUS. Depósito de Investigación de la Universidad de Sevilla
OAI Identifier:oai:idus.us.es:11441/160604
Online Access:https://hdl.handle.net/11441/160604
https://doi.org/10.1016/j.micromeso.2019.109968
Access Level:Open access
Keyword:Positron annihilation
Micropores
OAD thin films
TiO2
SiO2
Growing mechanism
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spelling Positron annihilation analysis of nanopores and growth mechanism of oblique angle evaporated TiO2 and SiO2 thin films and multilayersGarcía Valenzuela, AurelioButterling, MaikLiedke, Maciej OskarHirschmann, EricTrinh, Thu TrangAttallah, Ahmed G.Wagner, AndreasÁlvarez Molina, RafaelGil Rostra, JorgeRico, VíctorPalmero Acebedo, AlbertoGonzález Elipe, Agustín RodríguezPositron annihilationMicroporesOAD thin filmsTiO2SiO2Growing mechanismThe nano-porosity embedded into the tilted and separated nanocolumns characteristic of the microstructure of evaporated thin films at oblique angles has been critically assessed by various variants of the positron annihilation spectroscopy. This technique represents a powerful tool for the analysis of porosity, defects and internal interfaces of materials, and has been applied to different as-deposited SiO2 and TiO2 thin films as well as SiO2/TiO2 multilayers prepared by electron beam evaporation at 70° and 85° zenithal angles. It is shown that, under same deposition conditions, the concentration of internal nano-pores in SiO2 is higher than in TiO2 nanocolumns, while the situation is closer to this latter in TiO2/SiO2 multilayers. These features have been compared with the predictions of a Monte Carlo simulation of the film growth and explained by considering the influence of the chemical composition on the growth mechanism and, ultimately, on the structure of the films.Ministerio de Economia, Industria y Competitividad (MINECO). España MAT2016-79866-RConsejo Superior de Investigaciones Científicas (CSIC) 201560E055Ministerio de Economia, Industria y Competitividad (MINECO). España 201860E050Elsevier B.V.Física Aplicada IEuropean Commission (EC). Fondo Europeo de Desarrollo Regional (FEDER)Ministerio de Economia, Industria y Competitividad (MINECO). EspañaConsejo Superior de Investigaciones Científicas (CSIC)2020info:eu-repo/semantics/articleinfo:eu-repo/semantics/submittedVersionapplication/pdfapplication/pdfhttps://hdl.handle.net/11441/160604https://doi.org/10.1016/j.micromeso.2019.109968reponame:idUS. Depósito de Investigación de la Universidad de Sevillainstname:Universidad de Sevilla (US)InglésMicroporous and Mesoporous Materials, 295, Article number 109968.MAT2016-79866-R201560E055201860E050https://www.sciencedirect.com/science/article/pii/S1387181119308273info:eu-repo/semantics/openAccessoai:idus.us.es:11441/1606042026-06-17T12:51:07Z
dc.title.none.fl_str_mv Positron annihilation analysis of nanopores and growth mechanism of oblique angle evaporated TiO2 and SiO2 thin films and multilayers
title Positron annihilation analysis of nanopores and growth mechanism of oblique angle evaporated TiO2 and SiO2 thin films and multilayers
spellingShingle Positron annihilation analysis of nanopores and growth mechanism of oblique angle evaporated TiO2 and SiO2 thin films and multilayers
García Valenzuela, Aurelio
Positron annihilation
Micropores
OAD thin films
TiO2
SiO2
Growing mechanism
title_short Positron annihilation analysis of nanopores and growth mechanism of oblique angle evaporated TiO2 and SiO2 thin films and multilayers
title_full Positron annihilation analysis of nanopores and growth mechanism of oblique angle evaporated TiO2 and SiO2 thin films and multilayers
title_fullStr Positron annihilation analysis of nanopores and growth mechanism of oblique angle evaporated TiO2 and SiO2 thin films and multilayers
title_full_unstemmed Positron annihilation analysis of nanopores and growth mechanism of oblique angle evaporated TiO2 and SiO2 thin films and multilayers
title_sort Positron annihilation analysis of nanopores and growth mechanism of oblique angle evaporated TiO2 and SiO2 thin films and multilayers
dc.creator.none.fl_str_mv García Valenzuela, Aurelio
Butterling, Maik
Liedke, Maciej Oskar
Hirschmann, Eric
Trinh, Thu Trang
Attallah, Ahmed G.
Wagner, Andreas
Álvarez Molina, Rafael
Gil Rostra, Jorge
Rico, Víctor
Palmero Acebedo, Alberto
González Elipe, Agustín Rodríguez
author García Valenzuela, Aurelio
author_facet García Valenzuela, Aurelio
Butterling, Maik
Liedke, Maciej Oskar
Hirschmann, Eric
Trinh, Thu Trang
Attallah, Ahmed G.
Wagner, Andreas
Álvarez Molina, Rafael
Gil Rostra, Jorge
Rico, Víctor
Palmero Acebedo, Alberto
González Elipe, Agustín Rodríguez
author_role author
author2 Butterling, Maik
Liedke, Maciej Oskar
Hirschmann, Eric
Trinh, Thu Trang
Attallah, Ahmed G.
Wagner, Andreas
Álvarez Molina, Rafael
Gil Rostra, Jorge
Rico, Víctor
Palmero Acebedo, Alberto
González Elipe, Agustín Rodríguez
author2_role author
author
author
author
author
author
author
author
author
author
author
dc.contributor.none.fl_str_mv Física Aplicada I
European Commission (EC). Fondo Europeo de Desarrollo Regional (FEDER)
Ministerio de Economia, Industria y Competitividad (MINECO). España
Consejo Superior de Investigaciones Científicas (CSIC)
dc.subject.none.fl_str_mv Positron annihilation
Micropores
OAD thin films
TiO2
SiO2
Growing mechanism
topic Positron annihilation
Micropores
OAD thin films
TiO2
SiO2
Growing mechanism
description The nano-porosity embedded into the tilted and separated nanocolumns characteristic of the microstructure of evaporated thin films at oblique angles has been critically assessed by various variants of the positron annihilation spectroscopy. This technique represents a powerful tool for the analysis of porosity, defects and internal interfaces of materials, and has been applied to different as-deposited SiO2 and TiO2 thin films as well as SiO2/TiO2 multilayers prepared by electron beam evaporation at 70° and 85° zenithal angles. It is shown that, under same deposition conditions, the concentration of internal nano-pores in SiO2 is higher than in TiO2 nanocolumns, while the situation is closer to this latter in TiO2/SiO2 multilayers. These features have been compared with the predictions of a Monte Carlo simulation of the film growth and explained by considering the influence of the chemical composition on the growth mechanism and, ultimately, on the structure of the films.
publishDate 2020
dc.date.none.fl_str_mv 2020
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/submittedVersion
format article
status_str submittedVersion
dc.identifier.none.fl_str_mv https://hdl.handle.net/11441/160604
https://doi.org/10.1016/j.micromeso.2019.109968
url https://hdl.handle.net/11441/160604
https://doi.org/10.1016/j.micromeso.2019.109968
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv Microporous and Mesoporous Materials, 295, Article number 109968.
MAT2016-79866-R
201560E055
201860E050
https://www.sciencedirect.com/science/article/pii/S1387181119308273
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
application/pdf
dc.publisher.none.fl_str_mv Elsevier B.V.
publisher.none.fl_str_mv Elsevier B.V.
dc.source.none.fl_str_mv reponame:idUS. Depósito de Investigación de la Universidad de Sevilla
instname:Universidad de Sevilla (US)
instname_str Universidad de Sevilla (US)
reponame_str idUS. Depósito de Investigación de la Universidad de Sevilla
collection idUS. Depósito de Investigación de la Universidad de Sevilla
repository.name.fl_str_mv
repository.mail.fl_str_mv
_version_ 1869405304124342272
score 15.81155

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