A low-power-consumption out-of-Plane electrothermal actuator

This paper proposes a new vertical electrothermal actuator. It can be considered as a hybrid between the traditional in-plane buckle-beam actuator and the vertical hot-cold actuator. It is here referred to as vertical buckle beam. At identical dimensional and bias conditions, it features a displacem...

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Authors: Girbau Sala, David, Llamas Morote, Marco Antonio, Casals Terré, Jasmina|||0000-0002-1368-3950, Simó Selvas, Francisco Javier, Pradell i Cara, Lluís|||0000-0003-4026-226X, Lázaro Guillén, Antoni
Format: article
Publication Date:2007
Country:España
Institution:Universitat Politècnica de Catalunya (UPC)
Repository:UPCommons. Portal del coneixement obert de la UPC
Language:English
OAI Identifier:oai:upcommons.upc.edu:2117/1780
Online Access:https://hdl.handle.net/2117/1780
Access Level:Open access
Keyword:Microelectromechanical systems
Capacitors
Finite element analysis
Low-power electronics
Microactuators
MEMS
parallel-plate capacitors
Finite-element analysis
Vertical hot-cold actuator
In-plane buckle-beam actuator
Electrothermal actuator
Low-power-consumption
Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Radiocomunicació i exploració electromagnètica::Circuits de microones, radiofreqüència i ones mil·limètriques
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repository_id_str
spelling A low-power-consumption out-of-Plane electrothermal actuatorGirbau Sala, DavidLlamas Morote, Marco AntonioCasals Terré, Jasmina|||0000-0002-1368-3950Simó Selvas, Francisco JavierPradell i Cara, Lluís|||0000-0003-4026-226XLázaro Guillén, AntoniMicroelectromechanical systemsCapacitorsCapacitorsFinite element analysisLow-power electronicsMicroactuatorsMEMSparallel-plate capacitorsFinite-element analysisVertical hot-cold actuatorIn-plane buckle-beam actuatorElectrothermal actuatorLow-power-consumptionMicroelectromechanical systemsÀrees temàtiques de la UPC::Enginyeria de la telecomunicació::Radiocomunicació i exploració electromagnètica::Circuits de microones, radiofreqüència i ones mil·limètriquesThis paper proposes a new vertical electrothermal actuator. It can be considered as a hybrid between the traditional in-plane buckle-beam actuator and the vertical hot-cold actuator. It is here referred to as vertical buckle beam. At identical dimensional and bias conditions, it features a displacement larger than that of other vertical electrothermal actuators proposed so far in the literature. The actuator performance is demonstrated by means of an analytical model along with finite-element analysis. It is applied as a driving element in parallel-plate capacitors, where it is validated and its advantages in terms of power consumption are demonstrated empirically.Peer ReviewedIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC20072007-06-3020082008-03-06journal articlehttp://purl.org/coar/resource_type/c_6501NAhttp://purl.org/coar/version/c_be7fb7dd8ff6fe43info:eu-repo/semantics/articleapplication/pdfhttps://hdl.handle.net/2117/1780reponame:UPCommons. Portal del coneixement obert de la UPCinstname:Universitat Politècnica de Catalunya (UPC)Inglésengopen accesshttp://purl.org/coar/access_right/c_abf2info:eu-repo/semantics/openAccessoai:upcommons.upc.edu:2117/17802026-05-27T15:37:01Z
dc.title.none.fl_str_mv A low-power-consumption out-of-Plane electrothermal actuator
title A low-power-consumption out-of-Plane electrothermal actuator
spellingShingle A low-power-consumption out-of-Plane electrothermal actuator
Girbau Sala, David
Microelectromechanical systems
Capacitors
Capacitors
Finite element analysis
Low-power electronics
Microactuators
MEMS
parallel-plate capacitors
Finite-element analysis
Vertical hot-cold actuator
In-plane buckle-beam actuator
Electrothermal actuator
Low-power-consumption
Microelectromechanical systems
Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Radiocomunicació i exploració electromagnètica::Circuits de microones, radiofreqüència i ones mil·limètriques
title_short A low-power-consumption out-of-Plane electrothermal actuator
title_full A low-power-consumption out-of-Plane electrothermal actuator
title_fullStr A low-power-consumption out-of-Plane electrothermal actuator
title_full_unstemmed A low-power-consumption out-of-Plane electrothermal actuator
title_sort A low-power-consumption out-of-Plane electrothermal actuator
dc.creator.none.fl_str_mv Girbau Sala, David
Llamas Morote, Marco Antonio
Casals Terré, Jasmina|||0000-0002-1368-3950
Simó Selvas, Francisco Javier
Pradell i Cara, Lluís|||0000-0003-4026-226X
Lázaro Guillén, Antoni
author Girbau Sala, David
author_facet Girbau Sala, David
Llamas Morote, Marco Antonio
Casals Terré, Jasmina|||0000-0002-1368-3950
Simó Selvas, Francisco Javier
Pradell i Cara, Lluís|||0000-0003-4026-226X
Lázaro Guillén, Antoni
author_role author
author2 Llamas Morote, Marco Antonio
Casals Terré, Jasmina|||0000-0002-1368-3950
Simó Selvas, Francisco Javier
Pradell i Cara, Lluís|||0000-0003-4026-226X
Lázaro Guillén, Antoni
author2_role author
author
author
author
author
dc.subject.none.fl_str_mv Microelectromechanical systems
Capacitors
Capacitors
Finite element analysis
Low-power electronics
Microactuators
MEMS
parallel-plate capacitors
Finite-element analysis
Vertical hot-cold actuator
In-plane buckle-beam actuator
Electrothermal actuator
Low-power-consumption
Microelectromechanical systems
Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Radiocomunicació i exploració electromagnètica::Circuits de microones, radiofreqüència i ones mil·limètriques
topic Microelectromechanical systems
Capacitors
Capacitors
Finite element analysis
Low-power electronics
Microactuators
MEMS
parallel-plate capacitors
Finite-element analysis
Vertical hot-cold actuator
In-plane buckle-beam actuator
Electrothermal actuator
Low-power-consumption
Microelectromechanical systems
Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Radiocomunicació i exploració electromagnètica::Circuits de microones, radiofreqüència i ones mil·limètriques
description This paper proposes a new vertical electrothermal actuator. It can be considered as a hybrid between the traditional in-plane buckle-beam actuator and the vertical hot-cold actuator. It is here referred to as vertical buckle beam. At identical dimensional and bias conditions, it features a displacement larger than that of other vertical electrothermal actuators proposed so far in the literature. The actuator performance is demonstrated by means of an analytical model along with finite-element analysis. It is applied as a driving element in parallel-plate capacitors, where it is validated and its advantages in terms of power consumption are demonstrated empirically.
publishDate 2007
dc.date.none.fl_str_mv 2007
2007-06-30
2008
2008-03-06
dc.type.none.fl_str_mv journal article
http://purl.org/coar/resource_type/c_6501
NA
http://purl.org/coar/version/c_be7fb7dd8ff6fe43
dc.type.openaire.fl_str_mv info:eu-repo/semantics/article
format article
dc.identifier.none.fl_str_mv https://hdl.handle.net/2117/1780
url https://hdl.handle.net/2117/1780
dc.language.none.fl_str_mv Inglés
eng
language_invalid_str_mv Inglés
language eng
dc.rights.none.fl_str_mv open access
http://purl.org/coar/access_right/c_abf2
dc.rights.openaire.fl_str_mv info:eu-repo/semantics/openAccess
rights_invalid_str_mv open access
http://purl.org/coar/access_right/c_abf2
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
publisher.none.fl_str_mv IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
dc.source.none.fl_str_mv reponame:UPCommons. Portal del coneixement obert de la UPC
instname:Universitat Politècnica de Catalunya (UPC)
instname_str Universitat Politècnica de Catalunya (UPC)
reponame_str UPCommons. Portal del coneixement obert de la UPC
collection UPCommons. Portal del coneixement obert de la UPC
repository.name.fl_str_mv
repository.mail.fl_str_mv
_version_ 1869404606667161600
score 15.300719

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