Synthesis by aerosol assisted chemical vapor deposition and microstructural characterization of PbTiO3 thin films
Thin films of PbTiO3 were deposited onto (001) silicon single-crystal substrates by aerosol assisted chemical vapor deposition method at different temperatures, using organometallic precursors. With the objective of stabilizing and homogenizing the perovskite phase, the films were annealed at 800 °C...
| Autores: | , , , , , |
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| Tipo de recurso: | artículo |
| Estado: | Versión enviada para evaluación y publicación |
| Fecha de publicación: | 2013 |
| País: | México |
| Institución: | Centro de Investigación en Materiales Avanzados |
| Repositorio: | Fuente de Objetos Científicos Open Access del CIMAV |
| Idioma: | inglés |
| OAI Identifier: | oai:cimav.repositorioinstitucional.mx:1004/1844 |
| Acceso en línea: | http://cimav.repositorioinstitucional.mx/jspui/handle/1004/1844 |
| Access Level: | acceso abierto |
| Palabra clave: | info:eu-repo/classification/Aerosol-assisted chemical vapor deposition/Ferroelectrics info:eu-repo/classification/Thin films/Lead titanate info:eu-repo/classification/Scanning electron microscopy/X-ray diffraction info:eu-repo/classification/cti/1 info:eu-repo/classification/cti/22 info:eu-repo/classification/cti/2299 info:eu-repo/classification/cti/229999 |
| Sumario: | Thin films of PbTiO3 were deposited onto (001) silicon single-crystal substrates by aerosol assisted chemical vapor deposition method at different temperatures, using organometallic precursors. With the objective of stabilizing and homogenizing the perovskite phase, the films were annealed at 800 °C, in a Pb-rich atmosphere, for 4 and 6 h. The evolution of compositions and microstructure of the films was characterized before and after annealing, by grazing incidence X-ray diffraction, two-dimensional detection of grazing incidence diffraction with synchrotron radiation, scanning electronmicroscopy and high resolution transmission electron microscopy. X-ray diffraction results showed that the crystalline structure of optimized PbTiO3 films corresponded to a tetragonal perovskite-type, with lattice parameters a=0.387(4)nmand c=0.406(4)nm. In addition, the inverse pole figure of the fiber texture representation, had a Gaussian (1, 1, 0) component and distribution width Ω=15°. |
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