Reconfigurable microwave circuits
The research presented in this doctoral thesis introduces a developmental path focused on a design methodology and a fabrication process of a Metamaterial - Micro Electro Mechanical Systems (MTM-MEMS) antenna for reconfigurable microwave circuits. The MTM-MEMS antenna is conceptualized in this resea...
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| Tipo de recurso: | tesis doctoral |
| Estado: | Versión aceptada para publicación |
| Fecha de publicación: | 2011 |
| País: | México |
| Institución: | Instituto Nacional de Astrofísica, Óptica y Electrónica |
| Repositorio: | Repositorio Institucional del INAOE |
| Idioma: | inglés |
| OAI Identifier: | oai:inaoe.repositorioinstitucional.mx:1009/721 |
| Acceso en línea: | http://inaoe.repositorioinstitucional.mx/jspui/handle/1009/721 |
| Access Level: | acceso abierto |
| Palabra clave: | info:eu-repo/classification/Circuitos de microondas/Microwave circuits info:eu-repo/classification/Dispositivos micromecánicos/Micromechanical devices info:eu-repo/classification/Metamateriales/Metamaterials info:eu-repo/classification/cti/1 info:eu-repo/classification/cti/22 info:eu-repo/classification/cti/2203 |
| Sumario: | The research presented in this doctoral thesis introduces a developmental path focused on a design methodology and a fabrication process of a Metamaterial - Micro Electro Mechanical Systems (MTM-MEMS) antenna for reconfigurable microwave circuits. The MTM-MEMS antenna is conceptualized in this research as a three-dimensional device using the fusion of emerging technologies such as Metamaterials (MTM) and Micro Electro Mechanical Systems (MEMS). Together, they can provide very small (with respect to the size of the conventional RF devices) and reliable “smart circuits” at a minimal cost. The design of antennas using Metamaterial Technology implies a new concept in creating artificial materials that present unique electromagnetic properties, which are controllable and are not present in any known natural environment. Metamaterials open up new ways for innovation in communications systems, based on original designs that exploit singular properties, especially for microwave devices. The antenna presented here is based on Coplanar Waveguide (CPW) technology; therefore, the signal and ground are in the same plane, presenting high signal integrity (lower dielectric losses and lower conductive losses). The antenna developed in this research has been successfully integrated with RF-MEMS by embedding a parallel plates MEMS capacitor, capable of achieving a capacitance from 0.69 to 6.29 pF in a gap of up to 30 microns between the plates of the capacitor, with an actuation voltage of 20 to 40 V, and thus to achieve reconfiguration in frequency. This is, when the capacitance is varied, the resonant frequency of the antenna is tuned. This versatile antenna can be tuned in the 5.3 to 8.6 GHz range by varying the MEMS capacitors. Additionally, T bias line has been integrated in the same design. MTM-MEMS antenna was fabricated using surface micromachining technique, and it is integrated in a CMOS chip. The process is composed of five materials and four levels of masks on a silicon wafer of high resistivity acting as the mechanical support. Titanium (Ti) and aluminum (Al) are used as structural materials, with one suspended level for the mechanical structures, and AZ-P4260 was used as the sacrificial material. Silicon dioxide SiO2 and SU8 were used as dielectrics. In this case, SU8 was used as a dimple for the high frequency device. This fabrication process was planned, implemented and characterized, especially for microwave devices. |
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