REFRACTIVE INDEX MODULATION OF SU-8 POLYMER OPTICAL WAVEGUIDES BY MEANS OF HYBRID PHOTOTHERMAL PROCESS

This paper describes the fabrication and characterization of multimode polymer optical waveguides ob- tained using a SU-8-2005 polymer by means of photolithographic process. Critical information about refractive index modulation of polymer waveguides as function of fabrication parameters as pre-bake...

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Detalles Bibliográficos
Autores: D. Salazar-Miranda, F. F. Castillón, J. J. Sánchez-Sánchez, J. L. Angel-Valenzuela, H. Márquez
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2010
País:México
Institución:Centro de Investigación Científica y de Educación Superior de Ensenada
Repositorio:Redalyc-CICESE
OAI Identifier:oai:redalyc.org:62016243010
Acceso en línea:https://www.redalyc.org/articulo.oa?id=62016243010
Access Level:acceso abierto
Palabra clave:Ingeniería
polymer
modulation
photolithography
refractive index
Optical waveguides
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spelling REFRACTIVE INDEX MODULATION OF SU-8 POLYMER OPTICAL WAVEGUIDES BY MEANS OF HYBRID PHOTOTHERMAL PROCESSD. Salazar-MirandaF. F. CastillónJ. J. Sánchez-SánchezJ. L. Angel-ValenzuelaH. MárquezIngenieríapolymermodulationphotolithographyrefractive indexOptical waveguidesThis paper describes the fabrication and characterization of multimode polymer optical waveguides ob- tained using a SU-8-2005 polymer by means of photolithographic process. Critical information about refractive index modulation of polymer waveguides as function of fabrication parameters as pre-baked and ultraviolet exposure times is presented. Physical properties of the waveguides were determined by means prism-coupling technique, optical and SEM microscopy.Universidad Autónoma Metropolitana2010info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdf1665-2738https://www.redalyc.org/articulo.oa?id=62016243010Revista Mexicana de Ingeniería Química (México) Num.1 Vol.9reponame:Redalyc-CICESEinstname:Centro de Investigación Científica y de Educación Superior de Ensenadainstacron:CICESEenhttp://www.redalyc.org/revista.oa?id=620Revista Mexicana de Ingeniería Químicainfo:eu-repo/semantics/openAccessoai:redalyc.org:620162430102024-08-23T17:34:24Z
dc.title.none.fl_str_mv REFRACTIVE INDEX MODULATION OF SU-8 POLYMER OPTICAL WAVEGUIDES BY MEANS OF HYBRID PHOTOTHERMAL PROCESS
title REFRACTIVE INDEX MODULATION OF SU-8 POLYMER OPTICAL WAVEGUIDES BY MEANS OF HYBRID PHOTOTHERMAL PROCESS
spellingShingle REFRACTIVE INDEX MODULATION OF SU-8 POLYMER OPTICAL WAVEGUIDES BY MEANS OF HYBRID PHOTOTHERMAL PROCESS
D. Salazar-Miranda
Ingeniería
polymer
modulation
photolithography
refractive index
Optical waveguides
title_short REFRACTIVE INDEX MODULATION OF SU-8 POLYMER OPTICAL WAVEGUIDES BY MEANS OF HYBRID PHOTOTHERMAL PROCESS
title_full REFRACTIVE INDEX MODULATION OF SU-8 POLYMER OPTICAL WAVEGUIDES BY MEANS OF HYBRID PHOTOTHERMAL PROCESS
title_fullStr REFRACTIVE INDEX MODULATION OF SU-8 POLYMER OPTICAL WAVEGUIDES BY MEANS OF HYBRID PHOTOTHERMAL PROCESS
title_full_unstemmed REFRACTIVE INDEX MODULATION OF SU-8 POLYMER OPTICAL WAVEGUIDES BY MEANS OF HYBRID PHOTOTHERMAL PROCESS
title_sort REFRACTIVE INDEX MODULATION OF SU-8 POLYMER OPTICAL WAVEGUIDES BY MEANS OF HYBRID PHOTOTHERMAL PROCESS
dc.creator.none.fl_str_mv D. Salazar-Miranda
F. F. Castillón
J. J. Sánchez-Sánchez
J. L. Angel-Valenzuela
H. Márquez
author D. Salazar-Miranda
author_facet D. Salazar-Miranda
F. F. Castillón
J. J. Sánchez-Sánchez
J. L. Angel-Valenzuela
H. Márquez
author_role author
author2 F. F. Castillón
J. J. Sánchez-Sánchez
J. L. Angel-Valenzuela
H. Márquez
author2_role author
author
author
author
dc.subject.none.fl_str_mv Ingeniería
polymer
modulation
photolithography
refractive index
Optical waveguides
topic Ingeniería
polymer
modulation
photolithography
refractive index
Optical waveguides
description This paper describes the fabrication and characterization of multimode polymer optical waveguides ob- tained using a SU-8-2005 polymer by means of photolithographic process. Critical information about refractive index modulation of polymer waveguides as function of fabrication parameters as pre-baked and ultraviolet exposure times is presented. Physical properties of the waveguides were determined by means prism-coupling technique, optical and SEM microscopy.
publishDate 2010
dc.date.none.fl_str_mv 2010
dc.type.none.fl_str_mv info:eu-repo/semantics/publishedVersion
info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv 1665-2738
https://www.redalyc.org/articulo.oa?id=62016243010
identifier_str_mv 1665-2738
url https://www.redalyc.org/articulo.oa?id=62016243010
dc.language.none.fl_str_mv en
language_invalid_str_mv en
dc.relation.none.fl_str_mv http://www.redalyc.org/revista.oa?id=620
dc.rights.none.fl_str_mv Revista Mexicana de Ingeniería Química
info:eu-repo/semantics/openAccess
rights_invalid_str_mv Revista Mexicana de Ingeniería Química
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Universidad Autónoma Metropolitana
publisher.none.fl_str_mv Universidad Autónoma Metropolitana
dc.source.none.fl_str_mv Revista Mexicana de Ingeniería Química (México) Num.1 Vol.9
reponame:Redalyc-CICESE
instname:Centro de Investigación Científica y de Educación Superior de Ensenada
instacron:CICESE
instname_str Centro de Investigación Científica y de Educación Superior de Ensenada
instacron_str CICESE
institution CICESE
reponame_str Redalyc-CICESE
collection Redalyc-CICESE
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 14,964248

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