REFRACTIVE INDEX MODULATION OF SU-8 POLYMER OPTICAL WAVEGUIDES BY MEANS OF HYBRID PHOTOTHERMAL PROCESS
This paper describes the fabrication and characterization of multimode polymer optical waveguides ob- tained using a SU-8-2005 polymer by means of photolithographic process. Critical information about refractive index modulation of polymer waveguides as function of fabrication parameters as pre-bake...
| Autores: | , , , , |
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| Tipo de recurso: | artículo |
| Estado: | Versión publicada |
| Fecha de publicación: | 2010 |
| País: | México |
| Institución: | Centro de Investigación Científica y de Educación Superior de Ensenada |
| Repositorio: | Redalyc-CICESE |
| OAI Identifier: | oai:redalyc.org:62016243010 |
| Acceso en línea: | https://www.redalyc.org/articulo.oa?id=62016243010 |
| Access Level: | acceso abierto |
| Palabra clave: | Ingeniería polymer modulation photolithography refractive index Optical waveguides |
| Sumario: | This paper describes the fabrication and characterization of multimode polymer optical waveguides ob- tained using a SU-8-2005 polymer by means of photolithographic process. Critical information about refractive index modulation of polymer waveguides as function of fabrication parameters as pre-baked and ultraviolet exposure times is presented. Physical properties of the waveguides were determined by means prism-coupling technique, optical and SEM microscopy. |
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