A simple Al/SRO/Si structure with silicon nanoparticles as a UV and Vis photodetector

A photodetector that shows high photocurrent in the ultraviolet and visible wavelengths has been fabricated. The device consists of a metal-oxide-semiconductor (MOS)-like grid structure where the dielectric layer is a silicon-rich oxide (SRO) film. Its fabrication is completely compatible with silic...

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Detalles Bibliográficos
Autores: MARIANO ACEVES MIJARES, ALFREDO MORALES SANCHEZ
Tipo de recurso: artículo
Estado:Versión aceptada para publicación
Fecha de publicación:2009
País:México
Institución:Instituto Nacional de Astrofísica, Óptica y Electrónica
Repositorio:Repositorio Institucional del INAOE
Idioma:inglés
OAI Identifier:oai:inaoe.repositorioinstitucional.mx:1009/1226
Acceso en línea:http://inaoe.repositorioinstitucional.mx/jspui/handle/1009/1226
Access Level:acceso abierto
Palabra clave:info:eu-repo/classification/Photodetector/Photodetector
info:eu-repo/classification/Silicon rich oxide/Silicon rich oxide
info:eu-repo/classification/Photocurrent/Photocurrent
info:eu-repo/classification/Silicon nanoparticles/Silicon nanoparticles
info:eu-repo/classification/Electrical properties/Electrical properties
info:eu-repo/classification/cti/1
info:eu-repo/classification/cti/22
info:eu-repo/classification/cti/2203
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spelling A simple Al/SRO/Si structure with silicon nanoparticles as a UV and Vis photodetectorMARIANO ACEVES MIJARESALFREDO MORALES SANCHEZinfo:eu-repo/classification/Photodetector/Photodetectorinfo:eu-repo/classification/Silicon rich oxide/Silicon rich oxideinfo:eu-repo/classification/Photocurrent/Photocurrentinfo:eu-repo/classification/Silicon nanoparticles/Silicon nanoparticlesinfo:eu-repo/classification/Electrical properties/Electrical propertiesinfo:eu-repo/classification/cti/1info:eu-repo/classification/cti/22info:eu-repo/classification/cti/2203info:eu-repo/classification/cti/2203A photodetector that shows high photocurrent in the ultraviolet and visible wavelengths has been fabricated. The device consists of a metal-oxide-semiconductor (MOS)-like grid structure where the dielectric layer is a silicon-rich oxide (SRO) film. Its fabrication is completely compatible with silicon technology. SRO thin films with 1 to 12% silicon excess were deposited on silicon wafers by low pressure chemical vapour deposition technique. After thermal annealing, silicon nanoagglomerates were created. Current-voltage measurements in dark and under illumination conditions were done to test the devices.Elsevier B.V.2009info:eu-repo/semantics/articleinfo:eu-repo/semantics/acceptedVersionapplication/pdfhttp://inaoe.repositorioinstitucional.mx/jspui/handle/1009/1226reponame:Repositorio Institucional del INAOEinstname:Instituto Nacional de Astrofísica, Óptica y Electrónicainstacron:INAOEengcitation:Luna-López, J.A., et al., (2009). A simple Al/SRO/Si structure with silicon nanoparticles as a UV and Vis photodetector, Procedia Chemistry (1): 1171–1174info:eu-repo/semantics/openAccesshttp://creativecommons.org/licenses/by-nc-nd/4.0oai:inaoe.repositorioinstitucional.mx:1009/12262024-08-28T03:22:53Z
dc.title.none.fl_str_mv A simple Al/SRO/Si structure with silicon nanoparticles as a UV and Vis photodetector
title A simple Al/SRO/Si structure with silicon nanoparticles as a UV and Vis photodetector
spellingShingle A simple Al/SRO/Si structure with silicon nanoparticles as a UV and Vis photodetector
MARIANO ACEVES MIJARES
info:eu-repo/classification/Photodetector/Photodetector
info:eu-repo/classification/Silicon rich oxide/Silicon rich oxide
info:eu-repo/classification/Photocurrent/Photocurrent
info:eu-repo/classification/Silicon nanoparticles/Silicon nanoparticles
info:eu-repo/classification/Electrical properties/Electrical properties
info:eu-repo/classification/cti/1
info:eu-repo/classification/cti/22
info:eu-repo/classification/cti/2203
info:eu-repo/classification/cti/2203
title_short A simple Al/SRO/Si structure with silicon nanoparticles as a UV and Vis photodetector
title_full A simple Al/SRO/Si structure with silicon nanoparticles as a UV and Vis photodetector
title_fullStr A simple Al/SRO/Si structure with silicon nanoparticles as a UV and Vis photodetector
title_full_unstemmed A simple Al/SRO/Si structure with silicon nanoparticles as a UV and Vis photodetector
title_sort A simple Al/SRO/Si structure with silicon nanoparticles as a UV and Vis photodetector
dc.creator.none.fl_str_mv MARIANO ACEVES MIJARES
ALFREDO MORALES SANCHEZ
author MARIANO ACEVES MIJARES
author_facet MARIANO ACEVES MIJARES
ALFREDO MORALES SANCHEZ
author_role author
author2 ALFREDO MORALES SANCHEZ
author2_role author
dc.subject.none.fl_str_mv info:eu-repo/classification/Photodetector/Photodetector
info:eu-repo/classification/Silicon rich oxide/Silicon rich oxide
info:eu-repo/classification/Photocurrent/Photocurrent
info:eu-repo/classification/Silicon nanoparticles/Silicon nanoparticles
info:eu-repo/classification/Electrical properties/Electrical properties
info:eu-repo/classification/cti/1
info:eu-repo/classification/cti/22
info:eu-repo/classification/cti/2203
info:eu-repo/classification/cti/2203
topic info:eu-repo/classification/Photodetector/Photodetector
info:eu-repo/classification/Silicon rich oxide/Silicon rich oxide
info:eu-repo/classification/Photocurrent/Photocurrent
info:eu-repo/classification/Silicon nanoparticles/Silicon nanoparticles
info:eu-repo/classification/Electrical properties/Electrical properties
info:eu-repo/classification/cti/1
info:eu-repo/classification/cti/22
info:eu-repo/classification/cti/2203
info:eu-repo/classification/cti/2203
description A photodetector that shows high photocurrent in the ultraviolet and visible wavelengths has been fabricated. The device consists of a metal-oxide-semiconductor (MOS)-like grid structure where the dielectric layer is a silicon-rich oxide (SRO) film. Its fabrication is completely compatible with silicon technology. SRO thin films with 1 to 12% silicon excess were deposited on silicon wafers by low pressure chemical vapour deposition technique. After thermal annealing, silicon nanoagglomerates were created. Current-voltage measurements in dark and under illumination conditions were done to test the devices.
publishDate 2009
dc.date.none.fl_str_mv 2009
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/acceptedVersion
format article
status_str acceptedVersion
dc.identifier.none.fl_str_mv http://inaoe.repositorioinstitucional.mx/jspui/handle/1009/1226
url http://inaoe.repositorioinstitucional.mx/jspui/handle/1009/1226
dc.language.none.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv citation:Luna-López, J.A., et al., (2009). A simple Al/SRO/Si structure with silicon nanoparticles as a UV and Vis photodetector, Procedia Chemistry (1): 1171–1174
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
http://creativecommons.org/licenses/by-nc-nd/4.0
eu_rights_str_mv openAccess
rights_invalid_str_mv http://creativecommons.org/licenses/by-nc-nd/4.0
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Elsevier B.V.
publisher.none.fl_str_mv Elsevier B.V.
dc.source.none.fl_str_mv reponame:Repositorio Institucional del INAOE
instname:Instituto Nacional de Astrofísica, Óptica y Electrónica
instacron:INAOE
instname_str Instituto Nacional de Astrofísica, Óptica y Electrónica
instacron_str INAOE
institution INAOE
reponame_str Repositorio Institucional del INAOE
collection Repositorio Institucional del INAOE
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15.811543

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